Lightweight and Compact

-phase 380 to 415 VAC (50/60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz5 A 16/18 8.4/9.1 Rated power consumption 50/60 Hz5 kW (kVA) 4.3/5.4 (5.5/6.0) 4.4/5.6 (5.8/6.3) Noise level (Front 1 m/Height 1 m)5 dB (A) 73 75

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Safety Instructions

2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C 200C 260C Recommended radius Refraction value 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41 1.4 0.7 0.35 0.2 25 16 Max. operating pressure (MPa) MQR Compatible with the Food Sanitation Law Compatible with the test conforming to the Food Sanitation

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Guide Table Series MGF ø 40, ø 63, ø 100

Guide Table Bore size/ Standard stroke (mm) Number of auto switches 40 63 100 30, 50, 75, 100 30, 50, 75, 100 30, 50, 75, 100 2 pcs. 1 pc. "n" pcs. Nil S n Auto switch Nil Without auto switch (Built-in magnet) Select applicable auto switches from the table below. Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

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Precision measuring equipment (3-D measuring machines) Semiconductor manufacturing equipment Semiconductor inspection equipment Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Air (oxygen, nitrogen, etc.)

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F59F D-F5NTL D-G39C/K39C D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Y5/Y6/Y7/Y7V D-Y7BAL D-Y7W/Y7WV D-M5 D-M5W D-M5TL D-P3DW D-P4DWL D-F9G/H D-Y7G/H D-G5NBL D-F7NJL D-F6 D-F8 Solid state auto switches Reed auto

Solid State Auto Switches

/M9P/M9B 1575 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B 1576 D-F9G/F9H (Normally closed) 1577 Direct Grommet D-Y59A/Y59B/Y7P 1578 D-Y69A/Y69B /Y7PV General purpose D-Y7G/Y7H (Normally closed) 1579 D-M5N/M5P/M5B 1580 D-H7A1/H7A2/H7B 1581 Grommet D-G59/G5P/K59 1582 D-H7C Band Connector 1583 D-G39/K39 1584 Terminal conduit D-G39A/K39A 1585 D-F79/F7P/J79 1586 Grommet D-F7NV/F7PV/F7BV Rail 1587 D-J79C Connector

SQ1000/2000

Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)

MY1

(RedGreenRed) D-Y7BWV D-Y7BW D-Y7NWV D-Y7NW D-Y7PW Perpendicular D-Y7PWV Auto switch part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

SMC Wireless System PROFINET compatible

-ED4/ED5 -108No.EX-OMW0006-D EX600-ED4/ED5-2 -109No.EX-OMW0006-D EX600-ED4/ED5-3 -110No.EX-OMW0006-D EX600-EU1 EX600-EU1-2 -111No.EX-OMW0006-D EX600-EU1-3 -112No.EX-OMW0006-D Accessories -113No.EX-OMW0006-D 1.

Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

5 Port Solenoid Valve

, D-sub connector, 25 pins, 16 outputs EX600-DYPE PNP output, D-sub connector, 25 pins, 16 outputs EX600-DYNF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DYPF PNP output, Spring type terminal box, 32 pins, 16 outputs w Digital Output Unit EX600-DMNE NPN input/output, D-sub connector, 25 pins, 8 inputs/outputs EX600-DMPE PNP input/output, D-sub connector, 25 pins, 8 inputs

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B