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NUZ322GOHOO-lt5 DIN connctor (D)/ NIf4|220-ODOO5 ftft E g !

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Clean Exhaust Filter

7 g 12 g 17 g Plug-in 3 g 6 g 11 g 16 g One-touch fitting 5.5 g 8 g 16 g 24 g Bracket weight 1.2 g 2.5 g 3.5 g 5.5 g Applicable tubing material Note 6) (One-touch fitting type) PFA, Polyolefin, Soft polyolefin, Polyurethane Replacement period 2 years or when back pressure reached 0.1 MPa When the system fails to operate normally due to clogging Packaging Antistatic double packaging

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Bottom: 85 g G1/4/Straight: 115 g Bottom: 130 g 8 One-touch fitting/Straight: 50 g Bottom: 65 g Body 100 g Flow adjustment valve Lead wire Bracket Panel mount adapter DIN rail mounting bracket +45 g Weight +35 g +20 g +15 g +65 g +25 g Note 1) Refer to Example of Recommended Pneumatic Circuit on Features 2.

Low Profile Slide Table Series MXF

GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) GR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Applied part Guide Cylinder Dimensions: Stroke Adjusting Bolt Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25

e-Rodless Actuator

Horizontal mounting Ceiling mounting Wall mounting mn x a Static load (m) m1 m2 m3 1 3 x FE x Z Dynamic moment M1E Static moment m1 x g x X m2 x g x X M1 M2E Dynamic moment M2E does not occur. m1 x g x Y m2 x g x Y m3 x g x Z M2 1 3 x FE x Y M3E m3 x g x X M3 Note) Regardless of the mounting orientation, dynamic moment is calculated with the formulas above. g: Gravitational acceleration

Rotary One-touch Fittings Series KS/KX

(mm) Weight (g) H (Hex.) Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

3

g .100 g 452 g Mounting Bolt for MKB-Z Clamp Arm Mounting and Removal MK MK Mounting: Mounting bolt for through-hole type is available.

MK

Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 10 20 50 70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of dust, paper dust and scraps, etc. Dust Cover Without dust seal With dust seal Note 1) Dust seal material: Polyurethane Consult P/A for details.

PFxx-OMJ0005CN

G 6 1/4 (5/32") (5/16") 1/8 1/4 1/8 1/4 95 g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

ZPT/ZPX

Model Weight (g) Model Weight (g) Pad dia.

25

OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

Cylinder with Turntable Series MGT

D-APC 4 g M8-3 Connector size Number of pins Applicable series example Manufacturer D-BPC 4 g M8-4 Phoenix Contact SAC-3P D-DPC About 11 g M12-4 3 M8-3D Corrence Corporation M8 M8-4D OMROM Corporation XS3 DPhoenix Contact SAC-4P Corrence Corporation VA-4D 4 OMROM Corporation XS2 M12 Yamatake Corporation PA5-4I Hirose Electric Co., Ltd. HR24 DKK Ltd. CM01-8DP4S 1785