Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

PSxx-OMG0005CN

DC+ OUT PSE5615V 1 k DCLINE+ PSE56--28 420 mA 500 (24 V ) 100 (12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12

PF3A8xxH.eng

PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D 4 : For more information about the options, refer to our website (URL https://www.smcworld.com). Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

VT325

Grommet, Lead wire length 300 mm C Conduit D DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110 VAC, 50/60 Hz 02 1 4 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

Fieldbus system Ethernet POWERLINK compatible SI unit

C Current consumption The current necessary to operate each unit. DIN rail A metal rail conforming with DIN (German) standard. D D Side The side connected to the End plate when the product is connected to a manifold. Abbreviation of international (ingress) protection.

5 Port Air Operated Valve

5 Port Air Operated Valve VFA1000/3000/5000 Series RoHS SYA SYJA VZA VFA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA3 1495 VFA1000/3000/5000 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C[dm3/(sbar)] Type of actuation Port size Pilot port direction VFA1000 2 position single VFA1000 (B)2 4(A) 1 (P) (EB)3 5(EA) M5 x 0.8 1/8 VFA3000 VFA5000

1

The chart on the left illustrates the example when 100 [kPa], F.S. = 100 0 = 100 [kPa], 3.0% F.S. = 100 x 0.03 = 3 [kPa]. It means that if the tempareture is changed within the range of 0 to 50[C], the error will occur at the max. 3 [kPa].

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

0.4

consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.

Vacuum Equipment

Vacuum Area Diameter (Vacuum pressure: 84 kPa) after Vacuum Suction by Vacuum Pad (mm) Flat U Flat with ribs C Bellows B Deep D Large size H Type Large size bellows HB Material Size Part no.

The multi-pin connectors replace the

Connector type Connector type SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 2001 D-Export dept. P-100(D) Printed in Japan. This pamphlet is printed on recycled paper with concern for the global environment.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

tTV2000/3000

o 4 c > 0 3 I J o o $ 0 2 o 6 a 0 1 f o 5 0 0 0 50 75 100 Input signal %F S Pressure chafacteristicS Set pressure: 0 2tvPa Flow rate characteristics supp v pressure: 0 TMPa Relief flow characteristics suppty pressure: 0.7MPa 1 0 @ I aQ 0 5 o b 0 0 E = = o 0 5 1 0 2000 3000 4000 Flow rate 4min (ANB) lTU2000/3000 tlectro-Pneuma flegula Series |TV205I Hysteresis Linearity Repeatability a u o

VVXA21/22

86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Rated voltage G: Grommet (Lead wire length: 300 mm) D: DIN terminal DO: DIN terminal H: Grommet (Lead wire length: 600 mm) 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 240 VAC, Hz Other (Without connector) 50 60 50 60 50 60 4 5 6 7 50 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

DC: DL (With indicator light) Option Grommet G D DIN terminal 5 Base mounted 0 Manifold 4 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 5 9 24 VDC Construction Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body ported De-energized Base mounted

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.