Process Valve

Note 1) Note 2) Note 3) Note 4) Note 5) VNB VNB Specifications (Vacuum pilot type) Fluid Vacuum SGC 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range Pilot Solenoid Valve Specifications 101 to 47.9 kPa SGH Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ1-Q Symbol (Vacuum pilot type) Pilot solenoid valve Note1) SF4--23 SF4D DZ-23-Q VNC Valve type Type N.C.

3 Port Air Operated Valve

1/8 12(PA) port NO 2A VFRA 42 52 NC 12 12 VPA4 3R 1P NC SYJA (1/8) 12(PA) port 12.6 13.5 83 23 VZA 91 VTA VGA 74.5 73.5 VPA VPA 28.5 X VPA3 M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/8 1(P) port For vacuum/VPA544V-102 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 47 23 1/4, 3/8 3(R) port 17.6 NO 2A 42 52 NC 12 3R 1P NC 1/8 12(PA) port 13.5 12.6 91 23 74.5 73.5 28.5 X M5

1

9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 1/4 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5

100

p. 11 Constructionp. 12 How to Order Replacement Partsp. 13 Dimensionsp. 15 Multistage Ejector ZL3/ZL6 Series How to Orderp. 19 Ejector Specificationsp. 20 Supply Valve/Release Valve Specifications p. 20 Pressure Gauge Specificationsp. 20 Vacuum Pressure Switch Specificationsp. 21 Weightp. 21 Internal Circuits and Wiring Examplesp. 22 Exhaust Characteristics/Flow Rate Characteristicsp. 23

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CDVRA1L50 108 4.5 62 9 44 41 CDVRA1L63 127 5 76 11 55 48 CDVRA1L80 154 6 92 13 67 58 CDVRA1L100 189.5 6 112 13 87 73.5 11-7-23 24 Rotary Actuator: Angle Adjustable Type Rack & Pinion Style Series CRA1U Size: 50, 63, 80, 100 Angle adjusting mechanism is provided as standard.

CRQ2

The figure shows the view from the long shaft end. 11-8-23 24 Series CRQ2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC22: Without Inner Rubber Bumper, -XC30: Fluoro Grease -X6: Shaft, Parallel Key Made of Stainless Steel Spec.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 A port B port MSQ MRQ D20Rotary actuator A port B port Angle adjuster Cap (mm) Keyway dimensions b (h9) h (h9) l Model CRB2BWU4020 4 0 0.030 4 0 0.030 11-2-23 23 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster and auto switch

CE2

64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23

RSQ

However, these dimensions change within the ranges shown below as the adjusting bolt is raised (energy absorption is reduced). 24 16, 13.5 11.5, 14 16 A 47 58 B 35 40.5 Bore size (mm) 40 50 10-8-22 23 23 Stopper Cylinder: Adjustable Mounting Height Series RSG Rod End Configuration: Lever Type with Shock Absorber Variable energy absorbing type/Flange mounting style These 2 figures show

CJP

40.5 45.5 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 M12 x 1.0 8 30.5 35.5 40.5 45.5 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 55.5 CS1 M14 x 1.0 10 30.5 35.5 40.5 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 45.5 55.5 C76 Symbol Z C With auto switch Bore size (mm) W 5 st 10 st 15 st 20 st 30 st E P C85 6 10 15 16.5 10.5 20 62.5 57.5 3 52.5 47.5 20 13 21 75.5 65.5 60.5 3 55.5 50.5 C95 24.5 15.5 23

MGC

142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Symbol Position detector arms Switch bracket Positioning angle For the applicable auto switch model, refer to the table below. a b c d 10 11 12 13 14 15 20 23 25 180 X X X X X Data X X X X X X X 90 b d X Table position detector arm X X X X X X X a X Switch mounting bracket X X Cylinder Unit/Applicable Auto Switch Load voltage Lead wire length (m) Auto switch model Electrical entry Wiring

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

For more information, please refer to page 8-14-23.

EXxx-OMQ0015CN

No.EX-OMQ0015CN PROFINET SI // EX600-SPN# EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 LED 17 19 19 20 21 21 22 22 23 23 23 25 26 35 35 56 GSDML 56 56 SIEMENS PLC S7 57 62 65 66 66 71 -1No.EX-OMQ0015CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow