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Option Z With light/surge voltage suppressor (Except grommet type) Rated voltage External pilot 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Electrical entry G Grommet D DIN terminal 4 5 6 24 VDC 12 VDC T Conduit terminal E Grommet terminal 7 240 VAC, 50/60 Hz 9 Other Option 4-9-1 2 Series VG342 Caution Specifications Light/Surge Voltage Suppressor Type of

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5

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. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

No.ZL3-OM00801-A / / ZL3 ZL6 No.ZL3-OM00801-A 2 1. 5 2. 6 3. 7 3.1. 7 3.2. 8 3.3. 9 3.4. 10 3.5. 12 4. 13 5. 14 6. 15 7. 16 8. 20 9. 21 10. 24 11. ,, 25 11.1. 25 11.2. 26 11.3. 26 12. 27 13. 28 1 - No.ZL3-OM00801-A /ZL3ZL6 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

IDFA60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V020 Chapter 9 Option C 9.2 Precautions for installation and handling IDFA60/70/80/90 Series 9-2 IDX-OM-V020 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.

No.EX-OMN0029CN-D TMSI DeviceNet // EX600-SDN#A EX600-ED# 3 9 10 12 12 15 15 17 SI 18 18 19 19 20 LED 25 27 27 28 29 29 30 30 31 31 31 -1No.EX-OMN0029CN-D 33 34 43 43 54 EDS 54 TM 55 RSNetWorx for DeviceNet 59 60 63 TM 65 DeviceNet 77 -2No.EX-OMN0029CN-D *1) (ISO/IEC)(JIS) *2) *1) ISO 4414 Pneumatic fluid power -General rules relating to systems ISO 4413

9, @0 EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/122 EX140 EX180 EX510 M8/M12 ATEX @1, @2, @4, @5 Type 1 Type 2 Type 3 Type 1 Type 2 @6, @7 @1 to @3 EX260 EX250 p. 233 p. 235 @6 to #0 @6, @9 VProduct Table Series Protocols No. Part no. Connector type Cable length EtherNet/IP End plate EX600-ED2m !

A flow rate of up to 9 can be accumulated. The accumulated flow rate is reset when the power supply turns OFF. (With PF2A7H, it is possible to select a holding function.) Real-time switch output, accumulated switch output, or accumulated pulse output can be selected as an output type.

Users equipment side To the thermo-chiller Users equipment side 1 2 SD+ RD Circuit diagram Internal Internal circuit circuit 3 5 SG SD 9 5 SD SG The terminal resistance of RS-485 (120 ) can be switched by the operation display panel.

VFA3000 DXT031-30-11 DXT156-9-8 Note VFA5000 HNBR 7 Gasket 1/4: VF5000-71-1 3/8: VF5000-71-2 1/2: VF5000-71-3 8 1/4: VF3000-71-1 3/8: VF3000-71-2 Sub-plate Aluminum die-casted Round head combination screw (1 pc.) DXT031-44-1 (M4 x 39.5, With spring washer) Caution For mounting valve Tightening Torque for Mounting Valve Hexagon socket head cap screw (1 pc.)

LED2 display : Absolute pressure : Peak hold : Bottom hold ZSP ISl : Normal mode : Reversed output mode (Refer to p.3.1-9 .) (Refer to p.3.1-9 .) Table 3 Table 2 ZSM PFl IFl Manual calibration 1. Calibration value input mode (manual) 2. Input set point value for OUT1 (1) 3.

VN Solenoid valve option Nil Standard Rated voltage 1 2 3 4 5 6 7 8 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-9 by Applicable Fluids Check List for special fluids outside of the standard.

Painting and coating Warnings or specifications printed or pasted on the product should not be erased, removed or covered up. 9 Series VKF300 3 Port Solenoid Valve/Precautions 2 Be sure to read before handling. Lubrication Piping Caution Caution 1.

9 35 35 10 9 9 M18 x 1.5 M18 x 1.5 10 H H Width across flats 16 Width across flats 16 45 28 Width across flats 37 4-M4 x 0.7 Width across flats 24 3-M3 x 0.5 G G 10 @ 10 F F @ E E Y Y 3 3 18 34 C C A A B D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B D Dimensions

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(Note: l,/aximum speed for 80 & 100mm bore s ze is 28 in/sec ) Engineercd pislon Urethane bumpers available as I Available in I bore sizes and 9 different mounting styles.

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

AS-14AB 5 147 2 AS-15AB 7 191 2 AS-16AB 9 236 2 AS-17AB AS-25A Threaded stud kit for manifold AS-9AB 1 set (Adapter for manifold mounting is included.) 3 111 2 AS-24AB 3 119 2 AS-19AB 5 179 2 AS-20AB 7 236 2 AS-21AB 9 258 2 AS-22AB 9 277 2 AS-25AB 9 293 2 AS-43B r Threaded stud kit for manifold AS-30A M4 4 M4 4 Adapter for manifold mounting 119 2 AS-45B 179 2 AS-47B 236 2 AS-48B 277 2 e L-bracket