SL5200

0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

NCA1

/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 5 7/8 2 5/8 3 1/4

Air Cylinder NCA1 Series

7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 5 7/8 2

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Unlocking the keys No Key operation LED Display (1) (current) pressure is displayed (2) Press key for 2 seconds or more. is displayed flashes on the display (3) (4) Press S-key is displayed for approx. 1 second (5) (6) Key lock is released (current) pressure is displayed *(4) Press key to cancel.

CHKD/CHKG

-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) 5 V, 12 V 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A96 3-wire (NPN) IC circuit 5 V 100 V 24 V Yes A93V 2 A90V A93 Grommet Relay PLC 2-wire 12 V A90 IC circuit No

JA/JAH/JB/JS

83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 112 200 300 500 1300 3100 5000 7900 15300

JA/JAH/JB/JS

2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05 0.07 0.16 0.31 0.58 1.08 2.7 4.7 Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa JA20-8-100

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) 5.87 (14s) 6.28 (159.5J 6.@ (170) 7.11 080.5) 7.52 (le) 7.93 (20r.5) 8.35 (/,2) ln25) Type 42R Manifold: Side Ported/ NVV3J3-42R4gt"E@-AS,nSf inch(mm) Grommet(G), (H) is-.sr & : tp.r?!

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) 5.87 (14s) 6.28 (159.5J 6.@ (170) 7.11 080.5) 7.52 (le) 7.93 (20r.5) 8.35 (/,2) ln25) Type 42R Manifold: Side Ported/ NVV3J3-42R4gt"E@-AS,nSf inch(mm) Grommet(G), (H) is-.sr & : tp.r?!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

) 5.87 (14s) 6.28 (159.5J 6.@ (170) 7.11 080.5) 7.52 (le) 7.93 (20r.5) 8.35 (/,2) ln25) Type 42R Manifold: Side Ported/ NVV3J3-42R4gt"E@-AS,nSf inch(mm) Grommet(G), (H) is-.sr & : tp.r?!

Low Profile Air Gripper Series MHF2

0 @2 w u !1 !2 !7 !5 @0 o y !9 !8 !4 r t e !6 Component Parts MHZ Note Material Material No. Description No.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Watchmakers screwdriver 5 to 6 Auto switch M2.5 x 4 Auto switch mounting screw Proper mounting position for stroke end detection Auto Switch Operating Range Model Electrical entry is in the direction MIW/MIS (mm) A E 8 12 20 25 32 D-M9, D-M9V D-F9W(V) Auto switch model 2 2.5 2 3 2.5 3.5 3.5 5 4.5 5.5 Note) The operating ranges are provided as guidelines including hysteresis and are not guaranteed

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Watchmakers screwdriver 5 to 6 Auto switch M2.5 x 4 Auto switch mounting screw Proper mounting position for stroke end detection Auto Switch Operating Range Model Electrical entry is in the direction MIW/MIS (mm) A E 8 12 20 25 32 D-M9, D-M9V D-F9W(V) Auto switch model 2 2.5 2 3 2.5 3.5 3.5 5 4.5 5.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

4 Port Solenoid Valve Series VQD1000

2 5 Body ported Base mounted Note) Latching type: Base-mounted type only.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

AIR COMBINATION

Example AC30C-03DM-SV-1NR-A AC 30 03 DG 1N A F 1N C 1 3 4 5 6 2 1 Symbol Description Body size 20 25 30 40 Nil c Pipe thread type 2 Note 1) Note 2) Port size 3 Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied. Note 3) Note 4) N.O. (Normally open) Drain port is open when pressure is not applied.

VQ20/30

The DIN rail is approximately 30 mm longer than the length of manifold. Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

Standard Combinations

AD27: Use piping whose I.D. is 2.5 or larger AD37/47: Use piping whose I.D. is 4 or larger Length is 5 m or less. Avoid riser piping. Recommended Tightening Torque (Nm) Air Supply Connection thread 1/8 1/4 3/8 1/2 Caution 7 to 9 12 to 14 22 to 24 28 to 30 Torque 1. Use clean air.

Return Filter

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, 1.5 years after the product is delivered, 1.5 years after the product is delivered, 1.5 years after the product is delivered, whichever is first. *2) *2) whichever is first. Also, the product may have specified durability, running distance or replacement parts.