Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

Bernoulli Gripper

V V V V V KQ2H06-M5G1 V KQ2H06-01GS1 V V KQ2H08-01GS V V Male connector Stainless steel One-touch fittings KQ2S04-M5G1 V V V V V V V KQ2S06-M5G1 V V V KQ2S06-01GS1 V V KQ2S08-01GS V V Hexagon socket head male connector Male connector KQG2H04-M5 V V V KQG2H06-01S V V KQG2H08-01S V V One-touch fittings/ Stainless steel 316 KQG2S04-M5 V v V V V V V KQG2S06

Air Slide Table Series MXQ

D-A9(V) D-M9(V) D-M9W(V) 0.10 to 0.20 0.05 to 0.15 Auto switch mounting screw (included with auto switch) Auto switch Watchmakers screwdriver Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. Normally closed (NC = b contact) solid state auto switches (D-F9G/F9H types) and solid state auto switch D-F8 are also available.

Series MLGP

Auto switch operating range (mm) Bore size (mm) Auto switch model 20 25 32 40 50 63 80 100 D-A9(V) 9 9 9 9.5 9.5 11 10.5 10.5 D-M9(V) D-M9W(V) 5.5 5 6 5.5 6 6.5 6 7 D-M9A(V) D-Z7/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y5/Y6 D-Y7P(V) 7.5 7 6.5 6 7 8 9.5 10 D-Y7W(V) D-Y7BA D-P3DWA 5.5 6 6.5 6 6.5 6 6 D-P3DW 6 5.5 5.5 5.5 6.5 7.5 7.5 D-P4DW 5 4 4 5 4 4 * Since this is a guideline including

Digital Pressure Switch

(example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance Output type The operation type of the switch output.

Vacuum Manifold for fieldbus system

Note 13) When option Y is selected, V for (4) exhaust sealing valve cannot be selected. -10No. ZKJ-OM00201-D 2.

Mechanically Jointed Rodless Cylinders

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

RLQ

Hs A B D-A7H D-A80H D-F7 D-J79 D-F7W D-A79W D-F7WV D-F7V D-F7BAVL D-J79W D-F79F D-F7NTL D-F7BAL Approx. Hs Approx.

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B D-A7H D-A80H D-F7 D-J79 D-F7W D-A79W D-F7WV D-F7V D-F7BAVL D-J79W D-F7F D-F7NTL D-F7BAL Approx. Hs Approx.

EXxx-OMQ0016

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

125

Pilot Solenoid Valve Specifications Internal pilot solenoid / External pilot solenoid Model VEX3121, VEX3221, VEX3321, VEX3421 VEX3122, VEX3222, VEX3322, VEX3422 Pilot valve V114, V115 Symbol Electrical entry Grommet (G), L plug connector (L), M plug connector (M), DIN terminal (D) Rated coil voltage [V] AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V DC 3 V, 5 V, 6 V, 12 V, 24 V Allowable voltage

Air Slide Table

12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

A_HEC-OM-K001

M O D E N o r m a l Function P V < 2 3 . 0 C # 2 S V 2 3 . 0 C M O D E N o r m a l [Tips] No key-in operation for 1 min.

CXT

5.5 D-F9W, D-F9WV DF9BAL D-A7, D-A80 D-A9(V) 12 11 6 7.5 10 10 9.5 9.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Possible to transfer a workpiece at low-speed.

12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

MY1

Perpendicular electrical entry type and D-Y7BAL cannot be mounted on 16, 20, 50 and 63. Consider using the in-line electrical entry type. Switch Mounting Bracket: Part No. 25 to 63: M9(V)/M9W(V)/M9A(V) Bore size (mm) Auto switch model 16, 20 25 to 63 D-M9/M9V D-M9W/M9WV D-M9A/M9AV BMG2-012 BMG2-012 Besides the models listed in How to Order, the following auto switches are applicable.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector, I/O cable*4 Interface (Communication protocol/Input/Output) Mounting Symbol Type Applicable interface Nil

LG1H

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected