Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

VZ1000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VQ7 EVS VFN Construction De-energized Energized Component Parts Replacement Parts Material ZDC Note Platinum silver Description No. q w e r t y u No. i Description Material Part no.

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Symbol Specifications/Content Applicable shaft type Mass Shaft type variation X, Y, Z, T, J, K (g) S, W XA1 to XA24 Shaft pattern sequencing I Size Standard mass X, Y, Z, T, J, K XA31 to XA59 Shaft pattern sequencing II 90 180 360 XC7 S, W, X, T, J Reversed shaft 10 120 150 200 XC8 to XC11 Change of rotating range 15 220 270 380 Change of angle adjustable range (0 to 100) XC12 to XC15 20

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to

Precision Cylinder Series MTS

5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

ZSE80/ISE80

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) None Nil 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient

Thermo-chiller

: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 460 VAC, u Piping length: Shortest 6 Fluid ow rate to maintain the cooling capacity.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note 5)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

W2M/4M

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

CC

RS H A RZQ Oil port size Converter side Oil port size Cylinder side 2-S Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 1/2 148.5 103.9 45 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J

CC

QB QL S T W RZQ CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 MI W S CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 CEP1 L Dimension CE1 (mm) 800 700 600 500 400 300 200 100 50 Effective oil level stroke (mm) CE2 CCT63603.5 503.5 378.5 278.5 228.5 728.5 CCT100611 511 386 286 836 736 ML2B CCT160624 524 399 1049

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

Air Catch Sensor

Refer to p.0-26 and 0-27 for Safety Instruction and common precaution of the products mentioned in this catalog, and refer to p.3.0-7 to 3.0-9 for precautions on every series.

Air-hydro Unit

Mounting hole for hexagon socket head cap screw Air port size Rc CC CC Oil draining hole Rc 1/4 Oil port size Rc (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 L Dimension (mm) 700 800