S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

Series AS-FM/AS-M/ASD-FM

Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.

MHK2

Refer to Effective Gripping Force for the gripping force at each gripping position on pages 12-6-7 to 12-6-11. P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

MHK2

Refer to Effective Gripping Force for the gripping force at each gripping position on pages 12-6-7 to 12-6-11. P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !

Multi-Axis Step Motor Controller

5 !6 No.

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

7

A filtration degree of 5 m or less should be selected.

Cylinder with lock

Bore size (mm) Bolt Hexagon wrench size Tightening torque (Nm) 32, 40 MB-32-48-C1247 4 5.1 50, 63 MB-50-48-C1249 5 11 80, 100 Foot MB-80-48AC1251 6 25 Other MB-80-48BC1251 5) When replacing the support brackets, the tie-rod nuts on the cylinder body will be loosened.

Precautions 1

2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

MXH

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55 89 6 25 25 60 60 30 30

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

LC6D/LC6C

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Tighten them with the hexagon socket head cap screw with washers 12 . 17 15 3 10 14 26 11 5 12 19 9 12 14 1 11 26 4 2 6 15 Cushion seal 4 Direction of the shaft(key) 38 - 7. Mount the pipe 21 to the sub-plate 18 19 and 30 and fix with hexagon socket head cap screws 22 31 to the body 1 . 8.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

CE2

11 11 CC Grommet (In-line) 13 14 13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also

Vacuum Gripper

-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B

Vacuum Gripper

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

High Vacuum L Type Valve

Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.