Pressure Sensor Controller

No.PS-OMG0002-G PRODUCT NAME Pressure Sensor Controller MODEL / Series / Product Number PSE300 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Mounting and Installation 10 Installation 10 Wiring 12 Internal circuit and wiring example 14 Setting 16 Pressure Setting 19 Other Functions 21 Maintenance 23 Troubleshooting 24 Specification 31

Regulator for 2 MPa ARX 20

400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

XLG Series

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

9 8 7 6 5 4 3 2 1 310 600 281 571 252 542 223 513 194 484 165 455 136 426 107 397 78 368 L1 L2 L3 L4 L5 49 339 300 590 271 561 242 532 213 503 184 474 155 445 126 416 97 387 68 358 39 329 337.5 625 300 587.5 275 562.5 250 537.5 212.5 500 187.5 475 162.5 450 137.5 425 100 387.5 75 362.5 348 635.5 310.5 598 285.5 573 260.5 548 223 510.5 198 485.5 173 460.5 148 435.5 110.5 398 85.5 373 298.8

MNB

Standard Stroke DMaximum manufacturable stroke Bore size (mm) -X Standard stroke (mm) 20700 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 800 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500

PSxx-OMG0001CN

DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

IDX-OM-U022

ON OFF 2 3 4 6 1 2 4 8 5 10 0.5 ON:SEC OFF:MIN 0.5 IDFA100F150F 4 4 4.2 IDX-OM-U022 5. 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDFA100F150F 5 1 5.1 IDX-OM-U022 5. ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 INOUT INOUT () IDFA100F150F 5 2 5.1 IDX-OM-U022 5. 5.2 1-3 5.1 3.7 OFF () ON OFF ON IDFA100F150F 5 3 5.2 IDX-OM-U022 5. 5.3 R () OFF OFF OFF ON

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

Made to Order Specifications:

Specifications AFF11B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on page 14-20-10. Refer to How to Order for standard specifications on page 14-20-10.

NVZseies

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

FHM

0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Minimum operating pressure Without auto switch: 10 to 70C Ambient and fluid temperature (With no freezing) With auto switch: 10 to 60C Piston speed 50 to 500 mm/s Same dimensions as those of the standard cylinder (Series CA2) Cushion Interchangeable Thread tolerance JIS class 2 To 250 st : 251 to 1000 st : 1001 to 1500 st : +1.0 0 +1.4 0 +1.8 0 Stroke length tolerance Lubrication Not required

3 Way,3 Port Solenoid Valve NVZ Series

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

NVKF

Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

S 8 50, 100, 150, 200, 250, 300 "n" pcs. n 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Adjuster option Nil Without auto switch (Built-in magnet) Nil Rubber stopper B Shock absorber Metal stopper C One side centralized piping, switch rail Only for MXY12 One side centralized piping, with switch rail Nil Without one side centralized piping, without switch rail N The auto switch

3 Way Direct Acting NVKF 300 Series

llmb0nilm $ffh$ IUUff 300 Electrical entry Grommet Lead wire length: 12inch (300mm) ' (H) Grommet lype with 24 inch leads is also available. Specialorder only. Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.