LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

to 5 V) 22 0XY With suction filter M6 x 1 (Option) NPN open collector 1 output Failure predict function without analog output Note 2) Single mounting type: M5 x 0.8 female threaded. 23 NPN open collector 1 output Failure predict function with analog output (1 to 5 V) 24 765 Series ZSE3/ISE3 Specifications Vacuum ZSE3 Positive pressure 100 kPa ISE3L Positive pressure 1 MPa ISE3 Model 0 to 101

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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MW printing MW 16400DN Printed in Japan.

Manifold Specifications

Port Solenoid Valve Body Ported Series VZ1000 Type 20 Manifold VV4Z1-20Station 1(Mounting hole) Grommet (G), (H) VK VZ VF Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) (3 port valve) VFR (A port) VP4 VZS VFS (Pitch) (Mounting hole) VS4 4-Rc 1/8 (P , R port) (A, B port) VQ7 EVS VFN 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) (mm) Stations 2 3 53 40 69 56 4 85 72 5 101

2-Color Display High Precision

female thread) NPT1/8 (With M5 female thread) M5 x 0.8 female thread G1/8 6 one-touch fitting 4 one-touch fitting Rc1/8 Port size Sensor pressure receiving area Silicon Material of parts in contact with fluid ZDC2, POM, Stainless steel 304, C3604 (Electroless nickel plated) O-ring: HNBR C3602 (Electroless nickel plated) O-ring: HNBR ZDC2 O-ring: HNBR Piping port Weight 78 g 79 g 97 g 104 g 101

Booster Regulator/Air Tank

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MP printing OW 7150SZ Printed in Japan. D-DN

c

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QQ printing QQ 7850SZ Printed in Japan. D-DN

In-line Air Filter

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QY printing QY 8150SZ Printed in Japan. D-G

ZSE80/ISE80

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure M 80 ZSE 02 N Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English

MXW

(N) MTS Symbol Specifications Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101

MRQ

Symbol Specifications/Description Intermediate stroke Rod-end female thread Change of angle adjustable range Long Stroke (101 to 200 mm) MSQ X1 X2 X5 X10 Linear Motion Parts/Standard Stroke MSZ 32, 40 Standard stroke (mm) Size 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 CRQ2X MSQX Refer to page 352 for other intermediate strokes.

DM

Cover mounting area Cover How to Order N 04 DM 6 Number of connecting tubes Accessory (Option) 1 cover (Single side) 2 covers (Both sides) C1 C2 6 12 6 12 Style Tube material Nil P S Multi-connector Plug side Socket side N Nylon Soft nylon Polyurethane NU Tubing O.D. 4 mm 6 mm 04 06 15-2-101

AP500

) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101