Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

EX500-Sx03_eng

Before Use Fieldbus system EX500-S 03 Wiring Product Summary LED Display Select the specified branch cable below.

Ionizer Gun

Power supply cable type/ IZG10-03 . 12 4. Function . 13 4-1. Name of parts . 13 4-2. LED indication . 13 4-3. Mode setting switch . 14 4-4. Emitter maintenance (cleaning and replacement) . 15 4-5. Alarm function . 17 5. Performance . 18 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 18 5-2.

VEX-OMT0003

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 15-9-72 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR))

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Metal handle Specifications 1/4 3/8 Port size 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.05 MPa Min. operating pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10 2 Speed Controller with One-touch Fittings In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

HAA

HAl Accessories (Options) HAA7 AT Auto drain Applicable Model HAA7 HAA15 HAA22 HAA37 HAA7-F AD402-03 HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F AD402-03 HAA22-S HAA37-F AD402-04 IDl Dust protecting filter Mounting bench HAA37-S AMG How to Select (Flow Capacity l/min (ANR)) Operation Principle AFF Model HAA7 HAA15 HAA22 HAA37 AMl 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000

S070

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24