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. -0- Contents Safety Instructions . 2 1Specification . 4 1.1 How to Order . 4 1.2 Specification . 5 1.3 Construction . 6 2.

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Specifications 1-2. Theoretical output 1-3. Spring reaction force 1-4. Allowable kinetic energy 1-5. Allowable lateral load 2. MountingInstallation P6 2-1. Design/Selection 2-2. Mounting 2-3. Piping 2-4. Lubrication 2-5. Air supply 2-6. Operating environment 2-7. Maintenance 3. ConstructionDescription P13 4. Dimensions P14 4-1. Dimensions 4-2. Dimensions of accessories 5.

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

Bore size Bore size MLGCl RSMLGC , #2 (#1+#2+#4) 3.2-8 Series MLGC Auto Switch Specifications Refer to p.5.3-2 for further information on auto switch single body.

C (F) note 2 -5~+50 (+23~+122) -20~+60 (-4~+140) Max.

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

M5 Mounting Actuator classification N: T-nut mounting L: T-bracket mounting Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, COMPACT, VALVE, VDW VALVE 3-WAY BRASS, CC, VDW BODY PORT 1/8 NPT, 0.44092 lb