MGC

2 !3 !4 !5 !6 !7 !8 No.

ISO Interface

C (F) note 2 -5~+50 (+23~+122) -20~+60 (-4~+140) Max.

ZCUK

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

Air Tank Series AT 1

250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Dedicated Controller

M5 Mounting Actuator classification N: T-nut mounting L: T-bracket mounting Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

(full span), GAUGE, GAUGE G GP, FVD, 99.30000 lb

(full span), GAUGE, GAUGE G GP, FVD, 0.04 lb

(full span), GAUGE, GAUGE G GP, FVD, 0.07 lb

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

With auto switch (Built-in magnet) Bore size 40 50 63 80 100 Bracket 2 Bracket 1 40 mm 50 mm 63 mm 80 mm 100 mm Mounting B L F G C D T Nil V W Without bracket Single knuckle joint Double knuckle joint Nil N Without bracket Pivot bracket Auto switch Basic Axial foot Rod flange Head flange Single clevis Double clevis Center trunnion Nil Without auto switch For applicable auto switch model,

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Finger closing port M3 x 0.5 M3 x 0.5 Finger opening port 25 M3 x 0.5 Finger closing port M3 x 0.5 Finger opening port 10 53 2 x 3 0 depth 6 +0.02 35.5 (A, B common view) 18.5 4 x M3 x 0.5 thread depth 6 12h9-0.043 0 2 x 4.2 1.5 (47) (A, B common view) 5 43.5 25.5 14.5 3.1 4.7 2-3 5.5 14.1 22.5 2 6 5 2 12 3.5e8-0.038 -0.020 M3 x 0.5 thread depth 4 Open: 13.5, Closed: 9.5 Vacuum suction port

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Nil Without auto switch B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis T Center trunnion * For applicable auto switches, refer to the table below.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Note 2) AS900 is available as special. 1/4 3/8 1/2 3/4 1 1 1 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. AS420 Thread type AS500 AS600 AS800 Nil Rc NPT G N F 1 4 1 2 AS900 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.