Large Type Vacuum Unit Series ZR 1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum pad connection port)
Rod Type Without magnet With magnet Nil D New body type (required if ordering D) Nil K Standard Non-Rotating Rod Notes 1,2) No magnet, 12 to 25 Nil 12 to 200 with magnet, and 32 to 200 w/o magnet Z Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 1) Not available for air-hydro type.
0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 03 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: Rc, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting
J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Tube deformation ratio at the minimum bending radius Here, : Deformation ratio (%) d: Tubing diameter (mm) L: Measured length (mm) D: Mandrel diameter (mm) (Twice against the minimum bending radius) Test temperature: 20 +/5oC Relative humidity: 65 +/5% (3) Do not use fluids other than listed on the specifications. Applicable fluids are air, N2 ,water and steam.
A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.
Element Description 1 Air Supply CDA supply for cylinder 2 Vent Cover / Valve Vent 3 Exhaust Cylinder Exhaust Port 4 LED Display Status LEDs 5 Fieldbus interface connector (BUS IN) Ethernet connection (Female M12, 4-pin socket, D-coded) 6 Fieldbus interface connector (BUS OUT) Ethernet connection (Female M12, 4-pin socket, D-coded for daisy chain operation) 7 Power supply in Cylinder operating
set position. 2 wiring methods Centralized Wiring Individual wiring Minimum operating pressure 30 kPa (ISA2-G) Energy consumption can be reduced compared with the conventional models (Conventional models: 50 kPa) Position of supply port: Either right side or left side is available. 865 A Air Catch Sensor Series ISA2 How to Order Manifold IISA2 N 3 B PL Without control unit SL C 3 B 1 E2 D
E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.