1.63

0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGPWA25 MGPWA50, 63 0.5 0.5 Plate displacement amount (mm) Plate displacement amount (mm) MGJ 50 63 MGPWA -200 0.4 0.4 MGPWA25-200 JMGP 0.3 0.3 50 63 MGPWA -150 MGPWA25-150 0.2 0.2 MGP 50 63 MGPWA -100 50 63 MGPWA -50 MGPWA25-100 0.1 0.1 MGPW MGPW MGPWA25-50 0 0 MGQ 0 80 20 40 60 0 20 40 60 80 100 Load from

3-Position Rotary Table

(CCW: Counterclockwise, C: Center, CW: Clockwise) C C C C CW CCW CW CCW CW CCW CW CCW Left 90: Right 90 Left 45: Right 45 Left 90: Right 30 Left 60: Right 90 Working Principle This model uses a 3-position 5-port solenoid valve (pressure center).

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 22 45 2 11-/22-MXP6-51 30 35 42 48.5 47 37 11 10 53 27.5 60

Series CE1

A CD CL CU CW CX CZ RR T 32 40 50 63 59 65 148 5.8 11.2 6.6 52.5 30 112.4 57 72.5 71 5.5 69.5 8 48 56 65 34 139 161 10 151 14 20 18 36 10 57.5 71.5 65.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 83.5 78 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 215.7 71 94 91 91 97 9 16.2 11 46 177.4 95 9 9 80 92 60

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19 AS321F-02-09 AS321F-03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17

AS-FG/ASD-FG

17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11

ITV0000

Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional

Series KP/KPQ/KPG

SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101 Grade 2 0.4 100 Grade 1 10-1 0.2 0 0.1 0.2 0.3 0.5 1 -20 0 20 40 60

Ozone Resistant

The residual ozone ratio in the lines of lube type reciprocating compressor 100 90 80 70 Residual ozone (%) 60 50 Air with atmospheric dew point: 17C Air with atmospheric dew point: 10C 40 30 20 Ozone depletion is much slower in a non-lube scroll type compressor than in a lube type reciprocating compressor.

MGZ Series

Minimum strokes for mounting of auto switches 40 50 63 Number of auto switches mounted Auto switch type Auto switch models 60 2 pcs. (same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs.

CRB1/Size: 10, 15, 20, 30

unit + 2 switches 30 30 50 60 30 30 50 60 Angle adjusting unit 30 47 90 150 30 47 90 150 1.1-4 Copper Free Precautions Size Rotation Vane style Port position 20 CRB1BW Be sure to read before handling.

Series KP/KPQ/KPG

SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101 Grade 2 0.4 100 Grade 1 10-1 0.2 0 0.1 0.2 0.3 0.5 1 -20 0 20 40 60