XL-OMV0005

Suffix symbol for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

XLGR Series

Note4) Two O-rings (8) are require per valve. 6 XL-OMP0001 Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.

IP8101 Series

D Fork lever-type fitting SShort type (M81.5) H External scale plate W With body cover window No.DIG-31900-OM002 73 Drawing No.DIG-31900-OM002 74 No.DIG-31900-OM002 75 No.DIG-31900-OM002 76 No.DIG-31900-OM002 77 No.DIG-31900-OM002 78 No.DIG-31900-OM002 79 No.DIG-31900-OM002 80 No.DIG-31900-OM002 81 No.DIG-31900-OM002 82 No.DIG-31900-OM002 83 Revision history A 26/09/2005 Address change B

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Operation mode command 0x4A (74) 0 R/W Operation pressure PS1 Set pressure 0 to 1050 (fixed kPa) Mode (PS1) U16 {0} Y Standby mode command 0x4B (75) 0 R/W Standby pressure PS2 Set pressure 0 to 1050 (fixed kPa) mode (PS2) U16 {0} Y Setting Solenoid Valve Stop 0x4D (77) 0 R/W Solenoid Valve Time Setting range099 Stop Time U8 {0} Y Setting the Pressure Ramp Up Duration Setting range 015000.1

STAINLESS STEEL CYLINDER

size (mm) 25 NBA-106S 32 BGS1-032S 40 BAF-04S 50 BAF-05S Auto switch mounting band 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA Auto switch Minimum Stroke for Auto Switch Mounting Mounting Basic type, Foot type, Flange type, Clevis type bracket 1 2 2 Number of auto (Rod cover side) (Different sides) (Same side) switches Switch mounting Port side Port side Port side side Minimum stroke 10 20 75

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

MRQB-OM0002

1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

humidity range [%RH] 90 or less(No condensation) Motor size 42 56.4 56.4 28 specifications Motor type Battery-less Absolute(Step motor 24VDC) Electric Encoder Battery-less Absolute encoder Rated voltage [V] 24 VDC10% Power [W] note6) Max. power 222 Max. power 116 Max. power 126 Max. power 222 Type note7) Non-magnetizing lock specifications Lock unit Holding force [N] 29 59 47 78 157 72 108 216 75

LEF-OM002xx

Operating humidity range [%RH] Motor size 56.4 Electric specifications Motor type Step motor(Servo 24V DC) Encoder Incremental A/Bphase (800 pulse/rotation) 24 VDC10% Rated voltage [V] 100 Power consumption [W] note5) 43 Standby power consumption when operating [W] note6) 141 Max.instantaneous power consumption [W] note7) Type note8) Non-magnetizing lock specifications Lock unit 225 113 75

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

This matches the controller. (1) LEG32MDGB-30 -4- 1.2 Specification Model LEG25 LEG32 LEG40 Horizonal (30,50 stroke, L=50 or less) Work load 20 45 60 kg*1 Vertical 24 27 27 Max.weight of transferred object[kg] *2 75 100 150 Pushing forceN*3*4*5 126 to 238 156 to 370 266 to 553 Actuator specifications Speedmm/s*5 18 to 250 24 to 200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Product Weight [kg] Stroke [mm] Lock weight Model 50 75 100 150 8 1.06 1.23 0.16 16 2.39 2.78 0.32 25 4.82 5.42 6.22 0.61 -4- How to order Coution The actuator body and controller are sold as a package. If when only the actuator is purchased separately, confirm that the combination of the controller, which you have and the actuator is compatible.