CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Free Mount Cylinder Double Acting, Single Rod Series CU 6, 10, 16, 20, 25, 32 How to Order CU 6 30 D 30 6 30 M9BW CDU With auto switch D Made to order Refer to page 484 for the Made to Order specifications. Built-in magnet Number of auto switches Bore size 2 pcs. 1 pc.

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VXR21/22/23

Add 10 g for conduit type, 30 g for DIN terminal 60 g for conduit terminal type respectively. Refer to Glossary on page 17-3-15 for details of max. operating pressure differential min. operating pressure differential and max. system pressure.

V

~ 75PSI 30 ~ 75 PSI Standard Supply Pressure 0.4MPa / 160PSI Hysteresis Hysteresis modo, wind comparator modo 160PSI Operating Temperature Range 5 ~ 50C / 40~120PSI 40~120 PSI Temperature Specification + -3%F.S.

Adsorption Plate

SP 30 1 1 Adsorption Plate Port position Refer to the table for the port position dimensions on the side. The back side port is plugged with a Tapered Screw Plug.

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 1/4 (P port) 1.2 (Breathing hole) 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 1/8 (EA, EB port) 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8

        Series VKF300

%& Series VKF300 * ( / 73 * "" ()*+ "" ,&30 ! // 44 44 $ %& ' !" # $% / ! ! ' &30 0 5 6 !!"0 44 & 111 ((( 35 44 & $ ' ' & "" ()*+. /# ,VV061 &30 ! // 44 44 $ %& ' V100 !" # $% S070 &30 0 5 6 !!"0 44 & / ! ! ' VQD 111 ((( $ ' ' VKF & VK ! "# VT "" ()*+ "" ,VS &30 ! // 4 $ ! "# %& 0" ' &30 0 5 6 !!"0 44 & / ! ! ' & * !2 111 ((( 35 44 & $ ' ' &30 !

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Socket only (3 pcs.) 300A 600A 1000A 2000A 3000A AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance

Fieldbus System

623 635.5 648 660.5 673 673 685.5 698 7 510.5 523 535.5 548 560.5 573 573 585.5 598 610.5 623 635.5 635.5 648 660.5 673 685.5 698 698 710.5 723 735.5 748 8 560.5 573 585.5 598 598 610.5 623 635.5 648 660.5 673 673 685.5 698 710.5 723 735.5 735.5 748 760.5 773 785.5 798 9 610.5 623 635.5 635.5 648 660.5 673 685.5 698 698 710.5 723 735.5 748 760.5 760.5 773 785.5 798 810.5 823 835.5 835.5 30

AZ1000

in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa Ports Code Ports 2 ports 3 ports 4 ports 3) Not available with SHP material. 4) PTFE recommended for applications such as

BP1000

in.Hg to 30 psig 2P 4PL Please refer to the following porting configurations. 2) Pressure gauge unit MPa or psig/bar selectable.