ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Fluid Air Proof pressure 1.5 MPa 1.0 MPa Maximum operating pressure 0.1 MPa Minimum operating pressure 10 to 60C (No freezing) Ambient and fluid temperature Piston speed Note) 50 to 500 mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) +1.5 0 Stroke length tolerance mm Note) Speed with no load Standard Strokes Bore size (mm) Standard stroke (mm) 20 to 63 25, 50, 75

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

tolerance Cushion Rubber bumper Mounting Foot, Rod flange, Head flange, Single clevis, Double clevis Rod end configuration Rod end male thread, Rod end female thread Allowable rotational torque 0.25 Nm 0.55 Nm 1.25 Nm 2.0 Nm Rod non-rotating accuracy 0.5 1 0.8 Standard Stroke (mm) Size Standard stroke (mm) Maximum manufacturable stroke 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75

MLU

locking, retraction locking, each type) 0.7MPa Symbol Maximum operating pressure Extension locking Retraction locking 245 403 629 982 M5 x 0.8 Rc, NPT, 1/8 Unlocking port connection size W Holding force N (maximum static load) Non-rotating Rod Accuracy W 25 1 32 0.8 40 0.5 50 0.5 Size Non-rotating rod accuracy Standard Strokes Size Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75

Low Differential Pressure Sensor Series PSE550 ®

of 25C) Linearity Repeatability Indication light Enclosure Operating temperature range Operating humidity range Withstand voltage Insulation resistance Environmental resistance Vibration resistance Impact resistance Temperature characteristics Port size Material of wetted parts Sensor cable With sensor cable Without sensor cable 3-wire oval cable (0.15 mm2) 2-wire oval cable (0.15 mm2) 75

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

Series ZCUK is available in 5 bore diameters., CYL, FREE MOUNT, W/VACCUM *LQA, ACTUATOR, ZCU COMPACT CYLINDER, EE, 10MM ZCU DBL-ACT AUTO-SW, .29394 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKQ1049(54)53(63)57(67)61(71)65(75)69(79)??

40, 50, 63, Standard stroke (mm): 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, Rc, NPT or G port threads, Clean series, AME NO SIZE RAPART, AIRLINE EQUIPMENT, AME SUPER MIST SEPARATOR, 21, AME NO SIZE RAPART, 2.40722 lb

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, HB, 20MM CXSJ BALL BEARING, 1.54323 lb, ModelStandard stroke (mm) 102030405075100CXSJL200.3750.4010.4270.4530.4790.5440.609

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, LB, 32MM CXSJ BALL BEARING, 4.02343 lb, ModelStandard stroke (mm) 102030405075100CXSJL321.0321.0881.1441.2001.2561.3961.536