Possible to transfer a workpiece at low-speed.

8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

MNB

8 @0!7 !9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Rotary Clamp Cylinders

37 71.5 M10 x 1.5 7.5 Rc1/8 0.15 0.15 93.5 9 depth 7 NPT1/8 10 M6 x 10 0.1 0.2 0 0.062 14 30 40 5 6.5 24 69 14 3 7 52 12 16 5.5 G1/8 29.5 65 M10 x 1.5 8 Rc1/8 94.5 9 depth 7 NPT1/8 0.1 0.2 0 0.062 50 17 7 7.5 37 86 19 3.5 30 64 15 20 6.6 8 14 G1/4 34 76.5 10.5 Rc1/4 0.15 0.15 M8 x 1.25 112 M12 x 1.75 11 depth 8 NPT1/4 0.1 0.2 0 0.062 60 7 7.5 17 103 19 3.5 48 77 15 20 9 35 9 18 G1/4 80 35

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

Air Combination

126.4 87.6 35.9 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 1/4, 3/8 AC30-D 1/8 167.4 115.4 38.1 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-D 1/8 220.4 147.1 44 38.4 72.6 110 35.5 0 50 75.2 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40-06-D 1/8 235.4 149.1 44 38.4 77.6 110 35.5 0 50 80.2 40 55 9 18 7 50 65 3/4 AC50-D 1/8 282.4 220.1 48 38.4 93.1 110 45 0 70 96.2 50 70 11 20 8

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

VQ5000

Port PE 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 6 Base Mounted Type Series VQ5000 Dimensions (mm) 1in = 25.4mm Plug Lead Type Grommet 0 1 G H 2 position single: VQ515 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5 27.5 2

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

NBR (g) (g) ZPT40HBN-A14 -B 8 -B10 ZPT50HBN-A14 -B 8 -B10 ZPT63HBN-A16 -B 8 -B10 -B12 -B16 ZPT 80HBN-A16 -B 8 -B10 -B12 -B16 ZPT100HBN-A16 -B12 -B16 ZPT125HBN-A16 -B12 -B16 73 195 Pad dia.

HRX-OM-T002

7.3.3 How to release the pump thermal trip . 7-10 7.4 Other Errors . 7-12 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-6 8.2.5 Inspection during winter season . 8-

HRX-OM-X037

Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months. 8-4 8.2.4 Inspection every 6 months. 8-5 8.3 Operation Stop for an Extended Period of Time . 8-6 8.3.1 Discharge of the circulating fluid . 8-6 8.3.2 Discharge of the facility