DOC1003626

connection 3.3 Communication specification Table 3.3-1 Serial communication specification Item Specification Connector type (for the product) D-sub9P type Female connector Standard Select from EIA RS-485 / RS-232C Circuit type Half duplex Transmission type Start-stop Protocol Modbus terminal *1 Terminal resistance None Default setting *1 Refer to Modicon Co. protocol specifications "PI-MBUS-300

HRX-OM-W069

3.3 Communication specification Table 3.3-1 Serial communication specification Item Specification Connector type (for the product) D-sub9P type Female connector Standard Select from EIA RS-485RS-232C Circuit type Half duplex Half duplex Transmission type Start-stop Protocol MODBUS terminal1 Terminal resistance None :Default setting 1Refer to Modicon Co. protocol specifications "PI-MBUS-300

HRX-OM-Z015

HRX-OM-Z015 Chapter 3 Serial communication 3.3 Communication specification Table 3-1 Serial communication specification Item Specification Communication block (for the product) Terminal block M4 Standard EIA RS-485 Circuit type Half duplex Half duplex Transmission type Start-stop Protocol MODBUS terminal1 Terminal resistance Selectable 1Refer to Modicon Co. protocol specifications "PI-MBUS-300

A_HEC-OM-J017

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

HEC-OM-S008

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

A-HEC-OM-J004

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2 Kinunodai, Tsukubamirai-shi Ibaraki, 300-2493, japan E-mail: kaihatsu_6_g3@.smcjpn.co.jp A_HEC-OM-J004-4 Table of Contents Table of Contents Chapter 1 Safety Instructions . 1-1 1.1 Dangers, Warnings, and Cautions Used in This Manual . 1-1 1.1.1 Hazard Levels . 1-1 1.1.2 Definitions of Serious injury and Minor injury.

A_HEC-OM-K001

Product Development Div. 6, Engineering Headquarters Japan Technical Center, SMC Corporation, Address: 4-2-2 Kinunodai, Tsukubamirai-city, Ibaraki-ken, 300-2493 TEL: +81 297-52-6 FAX: +81 297-20-5007 E-mail: kaihatsu_6_g3@.smcjpn.co.jp Note: The contents of this manual are subject to change without notice.

High Vacuum L Type Valve

standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 2) for 0.5MPa 46 102 400 300

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

Return Filter

(Note1) (Petroleum,Water-glycol, Emulsion,Phosphoric ester) Applicable model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 INOUT Port size (Rc) 3/4B 1B 1 1/4B 1 1/2B 2B 2 1/2B 3B Drain port size M162 Rated flow Paper 50 80 120 160 260 450 600 rate Micromesh 60 100 150 200 300 550 700 (L/min) Operating pressure 1.0MPa Operating temperature 80oC Nominal filtration 1.