ISO Standard Hydraulic Cylinder

7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support 6/4 R Bleed port F S U

SMC Pneumatic Clean Series

descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British unit) Corresponding class indication ISO Class 1 ISO Class 2 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 ISO Class 9 Cleanliness classes

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Built-in magnet D With auto switch Bore size (mm) 10 C D U 16 30 D M9B 21 C D U 16 30 D M9B Cylinder stroke (mm) Copper, fluorine and silicone-free + low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 21 22 Relief type Vacuum suction type Auto switch D-A93

SMC Pneumatic Clean Series

descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British unit) Corresponding class indication ISO Class 1 ISO Class 2 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 ISO Class 9 Cleanliness classes

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting thread) AQ AP Finger closing port Vacuum suction port AN Finger opening port 4 x AK through (Thread for mounting attachment) S J O Auto switch mounting groove dimensions U

SMC Pneumatic Clean Series

descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British unit) Corresponding class indication ISO Class 1 ISO Class 2 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 ISO Class 9 Cleanliness classes

SMC Pneumatic Clean Series

descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British unit) Corresponding class indication ISO Class 1 ISO Class 2 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 ISO Class 9 Cleanliness classes

SMC

descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British unit) Corresponding class indication ISO Class 1 ISO Class 2 ISO Class 3 ISO Class 4 ISO Class 5 ISO Class 6 ISO Class 7 ISO Class 8 ISO Class 9 Cleanliness classes

CL

Nil S n Mounting style CNA Basic style Axial foot style Rod side flange style Head side flange style Rod side trunnion style Head side trunnion style Clevis style B L F G U T D CNS Auto switch Nil Without auto switch (Built-in magnet) CLS For the applicable auto switch model, refer to the table below.

20

7 Only for the VMG11 y Piping (bottom) 14 POM Combined with the elbow u. !9 !8 O-ring O-ring Parallel pin 15 16 17 18 19 NBR NBR !3 Stainless steel Stainless steel Stainless steel Cross recessed round head screw Hexagon nut Note) Grease is used on rubber and sliding sections.

Process Valve

When the pilot solenoid valve u is not energized (or when air is exhausted from the port P1 of the air operated type), the valve element r linked to the piston t is closed by the return spring y.