SI unit (CC-Link compatible)

B: Modified errors in text. C: Limited warranty and Disclaimer are added. D: Modified errors in text. E: Contents are added. F: Contents are added. [July 2016] G: Contents revised in several places. [August 2019] H: Modified errors in text. [ November 2019] I: Contents revised in several places.

Regulator

B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) Semi-standard G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch PNP open collector 1 output EB EB EB EB EC EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output

Fan Type Ionizer

Where the ambient temperature exceeds the operating temperature range. b. Where the ambient humidity exceeds the operating humidity range. c. Areas where abrupt temperature changes may cause condensation. d. Areas where corrosive gas, flammable gas or other volatile flammable substances are stored. e.

Regulator

B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) Semi-standard G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch PNP open collector 1 output EB EB EB EB NPN open collector 1 output + Analog voltage output EC EC EC EC NPN open collector 1 output

2/3 Port Solenoid Valve for Chemicals

B LVM1 (Rocker type) 3 port Universal LVM115 PAT.PEND A Dead volume B Body and plate material: PEEK C Diaphragm material: EPDM, FKM or Kalrez Bracket (Optional) Features 2 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 How to Order Series Number of ports Symbol Valve type Connection Wetted part material 11 N.C.

MP2 - Double detatchable head side clevis style (D)

MP2 Double detatchable head side clevis style (D) XD + Stroke A UB P + Stroke 2-EE MR MAX KK MM B CD (PIN) TH LR CB E WF LF + Stroke F Bore Size (in) MM KK A B CB CD E EE F LF+ LR MR P+ TH UB WF XD+ 500 (5") 1.000 3/4-16 1.13 1.500 1.280 .750 5.50 1/2 NPT .63 4.50 .94 .95 2.88 2.75 2.500 1.38 7.75 600 (6") 1.375 1-14 1.63 2.000 1.530 1.000 6.50 3/4 NPT .75 5.00 1.31 1.32 3.13 3.25 3.000 1.63

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

(B) 2 (A) 4 Symbol 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Port size Valve model Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100 RoHS How to Order B S 50 90 Z CRA1 With auto switch CDRA1 B S 50 90 M9BW Z Built-in magnet Number of auto switches Air cushion Mounting B Basic type L Foot type* Nil None C* With air cushion Nil 2 pcs. S 1 pc.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

DIN type is available with class B only. Refer to the Table (3) for the available combinations between each electrical option (S, L, Z) and rated voltage. Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in full-wave rectifier type as a standard. Table (1) Model/Orifice Size/Port Size Normally Closed (N.C.)

Digital pressure switch for energy-saving control ejector

P_1 = A-(A-B)/4 A = Maximum pressure value H_1 = | (A-B)/2| B = Minimum pressure value To clear the stored auto-preset settings, press the and buttons simultaneously for 1 second or longer. 28 - NO. ZQ-OM01501 [F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5% R.D.

Regulator

B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch EB EB EB EB PNP open collector 1 output EC EC EC EC NPN open collector 1 output + Analog voltage output ED ED ED ED NPN open collector 1 output +

DOC1019547

Nylon tube: Within +/-0.1 mm Soft nylon tube: Within +/-0.1 mm Polyurethane tube: Within -0.2 to +0.15 mm disconnects. 11 - Doc.no.DOC1019547 6.Construction Seal method/Gasket seal For M3,M5,10-32UNF B-B A-A Meter-out type Meter-in type Component Parts No.