XMA/XYA Series

Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s

10-my2c-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 103

10-my2h_my2ht-e

.: GR-S-010 (10 g) , GR-S-020 (20 g) 104

11-zcuk-e

Grease pack part no.: GR-S-010 (10 g) 63

Series 10-MGF Guide table ø40, ø63, ø100

Series 10-MGF Guide table 40, 63, 100 How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. 10 Clean series Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size Type Rc NPT G Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

NIL S Nominal size 10 15 Connecting port E: Axial side R: Body side Port Port Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

MHT2

D 32 MHT2 F9BW S The toggle mechanism holds workpiece even when pressure drops. Toggle type air gripper Number of auto switches Auto switch Without auto switch (Built-in magnet) Nil Nil Number of fingers 2 pcs. 1 pc. S n pcs. n 2 fingers 2 Auto switch is attachable. For the applicable auto switch model, refer to the table below.

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73 150 With auto switch CA1 Number of auto switches S

l

Air Cylinder/Low Friction Series CS1lQ Non-lube/125, 140, 160 How to Order Standard L Q 160 300 JR CS1 160 A53 L Q 300 JR CDS1 With auto switch Number of auto switches 2 1 3 n S 3 n With auto switch Mounting Basic Foot Front flange Rear flange Single clevis Double clevis Center clevis B L F G C D T Auto switch Low friction Without auto switch * Select the applicable auto switch from the

LC6D/LC6C

Calculation for speed and pulse frequencies Pulse frequency [pps] = (Speed [mm/s]/Lead [mm]) x Divisions per rotation Calculation for moving distance and pulse numbers Pulse numbers = (Moving distance [mm]/Lead [mm]) x Divisions per rotation LJ1 LG1 LC1 LX LC6D/LC6C Switches The divisions per rotation are as shown in the table below.

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

MHL2

D2012-4-1 2 Parallel Style Wide Opening Air Gripper Series MHL2 Size: 10, 16, 20, 25, 32, 40 How to Order D 16 MHL 2 1 Y7BW S Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.