HRX-OM-M091

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

HRX-OM-Q033

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

High Vacuum L Type Valve

Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0019 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46

HRX-OM-S010

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

LZ-OM004xx

thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46

Title not found

or less. 61 Incremental Type Series LECSA Absolute Type Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Model Selection Specific Product Precautions AC Servo Motor Control Signal Wiring Example: LECSB LECSBm-m LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46

Step Motor Controller

or less. 61 Incremental Type Series LECSA Absolute Type Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Model Selection Specific Product Precautions AC Servo Motor Control Signal Wiring Example: LECSB LECSBm-m LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE13 3/8 90 73 40 23.5 56 83 89 30 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE14 1/2 104 73 40 23.5 56 83 89 30 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2 3/4 105 78 50 29 67 94 100 41 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3 1 120 90 55 32 73 100 106 46

LG1H

When a positioning unit loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection

LJ1H

When a positioning unit loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection

LMU100/200 Series Mist Spray Unit

SMC Double pipe nozzle A A Cross section BB 3 (Max.)54 37 22 BLOW AIR 29 15 12 OIL AIR 35 26.5 16.5 8.5 Cross section AA L Dimension (mm) 20 200 25 250 30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

adjuster section 8 PPS 498 Series LVD Integral Fitting Type Hyper Fittings Dimensions Basic type LVC A D L LVA LVH LVD 4 x M K LVQ LQ1 LVN (Q) TL/TIL 2 x P One-touch fitting LQ3 Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2 x V PB PA A B Pilot port threaded type (mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46

Centering Unit

Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46