10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?
MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35
OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/
OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
OUT1, OUT2: OrangeIP65Operating: 23 to 122F, Stored: 14 to 140F (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/
10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?
the type of circulating fluid)Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc.PFA0 (atmospheric pressure) to 0.35 MPa1/2andquot; x 3/8andquot;50 to 95 F (10 to 35C) (no condensation)FEP, Stainless steel 304, Stainless steel 31673 psi (0.5 MPa)IN/OUT: FEP tube 3/8andquot; x 1/4andquot;1.3 to 2.6 gpm (5 to 10 L/min)Temperature: 50 to 95F (10 to 35C), Humidity: 35
4) ( C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature range ( C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35