Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

PFA/PFW

Construction For air Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR SUS PBT PBT Flow direction 5 Series PFA Digital Flow Switch for Air For Air Dimensions (mm)/ Integrated Display Type 1in=25.4mm Scale: 70% PFA7 0-m 1 5 -27 (N) -67 (N) 67 98 58 6 82 17 1.6 60 FLOW SWITCH UP 34 54 44 SET OUT1 OUT2 DOWN FOR AIR 24 2-Piping port size 4-4.5 40 50 (41.5

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

Model Selection 1

-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

AC AC Note) SYJ300 LPush-locking slotted style LWith indicator light and surge voltage suppressor 50 60 50 L100V AC / Hz 110V AC / Hz 200V AC / Hz 220V AC / Hz 1.8 (0.1) 60 50 M5 X 0.8 60 50 60 SYJ500 4.5 (0.25) Rc(PT)1/8 SYJ700 9.0 (0.5) Rc(PT) 1 8 / 1 4 Note) All AC voltage models have built-in surge voltage suppressor. 2.2-2 Series SYJ300/500/700 Manifold Variations A port size With built-in

SYJA3000

0.15 to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Operating pressure range (MPa) 2 position double 2 position double 2 position double 3 position (B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60

Series VCL

52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60