A_HEC-OM-I009

Controller internal circuit 5 6 Excessive temp. increase Controller internal circuit Detects temp. input value not less than 70 C. Excessive temp. decrease Detects temp. input value not more than 0 C. Controller internal circuit 7 Works when temp. change is smaller than over load detection temp.

High Vacuum L Type Valve

185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.

LA-OMP0023

A B C D E F G H LAT3-50 50 75 6 25 150 140 54.5 70 14 - 3. 2 Card Motor Return to Origin The Card Motor uses an incremental type sensor (linear encoder) to detect the position of the table. Therefore, it is necessary to return the table to the Origin Position after the power has been switched on. There are three [Return to Origin Position] methods as described below.

Air cylinder

. -3- 2 Product Specifications 1) Specifications Bore size 125,140,160 180,200,250,320 Fluid Air Max. operating pressure 0.97MPa 0.7MPa Proof pressure 1.57MPa 1.2MPa Min. operating pressure 0.05MPa Piston speed 0.05~0.5m/sec Cushion Air cushion Air cushion + Bumper Ambient and fluid 0~70(No freezing) temperature J(Nylon tarpaulin) : 0~70(No freezing) Ambient temperature for K(Heat resistant

MONOSASHI-KUN

of 70 mm/s to 500 mm/s. In addition, have reproWhen cylinder speed is too fast, prevent knocking and bounding. ducibility. counting error may occur. Knocking or bounding may also cause temporal high speed. Do not give torque to the piston rod. , Is torque given to the piston rod?

MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 3/4 , AFM20-A 40 87.6 9.8 20 45 AFM30-A 53 115.1 14 26.7 30 50 AFM40-A 70 147.1 18 35.5 38.4 75 AFM40-06-A 75 149.1 20 35.5 38.4 75 Model Bracket mount dimensions AFM20-A 30 27 22 5.4 8.4 40 2.3 28 AFM30-A 41 35 23 6.5 13 53 2.3 30 AFM40-A 50 52 26 8.5 12.5 70 2.3

Fieldbus system PROFINET compatible SI Unit

End Plate EX245-EA2-1/2/3/4/5 70 10.1. Parts and description 70 10.2. Specifications 73 11. Accessories 74 11.1. Markers 74 11.2. Y Connector 75 11.3. Seal cap 77 11.4. Joint pack 79 12. Dimensions 80 12.1. The Modules Manifold 80 13. Troubleshooting 81 13.1. EX245-SPN1A/SPN2A/SPN3A 81 13.2. EX245-DX1 83 13.3. EX245-DY1 83 13.4.

3

MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L x 110L x 130L CQ-M8 x 95L x 105L x 115L x 135L 50 60 70

CG5-S

27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90 5.5 M18 x 1.5 55 1/4 109 21.5 11.5 176.5 63 to 1200 35 32 27 81 38 20 21 14 58 11 72 M10 x 1.5 7 18 12 45 74 4 82 110 7 M18 x 1.5 69 1/4 109 21.5 11.5 178 80 to 1400 40 37 32 99.5 50 25 28 20 71 13 89 M10 x 1.5 10 22 12 55 82 4 100 130 7 M22 x 1.5 80 3/8 130 28 17 212 100 to 1500 40 37 41 125 60 30 29 20 71 16 M12 x 1.75 10 26 14 70

CM2

D-C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C7 D-C8 D-C73C D-C80C D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-A44A D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-B5 D-B6 D-H7l D-H7C D-B59W D-G5NTL Bore 20 25 32 40 A B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70

ITV

L-bracket Description ITV20ll ITV30ll Flat bracket 100 P3020114 25 15 L-bracket INI-398-0-6 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 36 7 m36 84 4-5.5 4-7 36 7 70 60 20 12 4-5.5 1.6 1.12-2 Electro-Pneumatic Regulator Series ITV2000/3000 Working Principles When the input signal rises, the air supply solenoid valve (1) turns ON, and the exhaust solenoid valve (2) turns OFF.

Series KP/KPQ/KPG

90 26 45 45 70 70 100 17 8 21.5 15.2 15.2 D 19 10 24 18.5 18.5 H 22 Connection threads 12 25 20.9 20.9 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter. 6 Clean One-Touch Fittings Series KP Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Straight Union: KPH Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing

Ozone Resistant

The residual ozone ratio in the lines of lube type reciprocating compressor 100 90 80 70 Residual ozone (%) 60 50 Air with atmospheric dew point: 17C Air with atmospheric dew point: 10C 40 30 20 Ozone depletion is much slower in a non-lube scroll type compressor than in a lube type reciprocating compressor.