17

With adjustment bolt With low/high load shock absorber + adjustment bolt (L/H unit) Standard piping type A unit L unit H unit Operating direction Side Front L R R R L L L R L Back Improved shock-less characteristics when a work piece is stopped.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L: L plug connector with lead wire LO: L plug terminal without lead wire M: M plug connector with lead wire MO: M plug terminal without lead wire 5 5 (R1) 1 (P) 3 (R2) Except VQZ1000 and metal seal style.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Compact manifold regulator ARM5 Series

L 1.25 P=12.5 5.25 7.5 25 35 5.5 1.5 L Dimension L=12.5 x n+10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

10

Bore size [mm] Dd9 L l m d Part no.

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

High Purity Fluoropolymer

Model H G F L M N E B (E) 2-B 4 6 LQ2T22 LQ2T21 4 6 L 18 19 12 34.5 19.9 1/4 10 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) 43 SMC 5 6 8 24 22 9 18 26.2 52 42.5 (E) (E) G H 12 19 10 12 L L 6 30 28 11 22 33.1 21 59.5 51 Class 2, 3 7 36 32 14 28 40 46 58.5 (M) N Inch sizes Applicable tubing O.D.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 DA 30 MM MM DA 30 DA 30 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 84 Simple Specials Series CP96/C96 Symbol Change of Trunnion Bracket Mounting Position 2 -XC14 Series C85 Series