Line Filter

P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Mist Separator

P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Micro Mist Separator

P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Activated Carbon Filter

P A B C D G J M N Q R S T U V AMK50 3/41 90 222 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 AMK60 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 -16- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

PSxx-OMU0002CN

5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.

PSxx-OMU0005CN

=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit" () 0 -12No.PS-OMU0005CN-C () SI ON/OFF ON-OFF 90

PSxx-OMU0008CN

TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D

PSxx-OMS0006CN

ONOFF (31 ) ON OFF 31 61 61 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMS0006CN-G NPN () () ON ON 0 31 ON-OFF ON ( )(P1L~P1H) ON (31 ) () "digit" () 0 () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMS0006CN-G ON ( )(n1L~n1H) ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 () () F () ripple -13No.PS-OMS0006CN-G (3X8L(2 ) 0.50.05 Nm ,, A

Digital Gap Checker ( compatible)

(Refer to page 90 for the Endian type of the upper level communication.) Check that the Endian type on the master upper level communication transmission format is Big Endian type or Little Endian type.

PSxx-OMF0005CN

90 () () 1 OPEN OPEN (15), 2 2 0.2MPa 0.16MPa 3 OPEN (A ) A (OPEN ) -19No.PS-OMF0005CN-E 0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G

ISA2.eng

Terminal board box (See the concentrated wiring method) Manual operation Slotted locking type (Tool required) Manual lock part Valve opening: Turn the screw 90 clockwise using a slotted screwdriver. The valve remains open even when the screwdriver is removed. Valve closing: Turn the screw 90 anticlockwise from a valve open position to its original position.

JSY1000/3000/5000 Series (Non Plug-in)

Used as a 3-Port Valve Manual Override Push-turn locking lever type [E type] Push down on the manual override by finger until it stops, and then turn it 90 clockwise. The manual override is then locked. To release it, turn it counterclockwise. If it is not turned, it can be operated the same way as the nonlocking push type.

VQ1000V-OMV0001

B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10