Soft start up valve with lock out

0.4) Operating pressure range 30 to 150 psi (0.2 to 1 MPa) A1 A2 A3 45 (0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122 37 61 1(P) to 2(A) 2(A) to 3(R) Effective area (mm2) 132 24 141 49 76 15 (0.1) 1.14 (0.64) 1.63 (0.74) 2.21 (1.00) 4.19 (1.90) 4.06 (1.84) Weight manual/solenoid lb (kg) 0 15 (0.1) (0.2) (0.3) (0.4) (0.5) (0.6) (0.7) (0.8) (0.9) (1.0) 30 45 60 75 90

AWM20 to AWM40

filtered particle size) Nominal filtration rating AWD20 to AWD40 0.01 m (95% filtered particle size) Maximum 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 3) Note 4) AWM20 to AWM40 Outlet side oil mist concentratio Max. 0.1 mg/m3 (ANR) (Before saturated with 0.001 mg/m3 (ANR) or less 0.008 ppm) Note 3) Note 4) AWD20 to AWD40 AWM20 to AWM40 330 150 820 Rated flow (l/min (ANR)) Note 5) AWD20 to AWD40 180 90

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Basic, Foot, Rod flange, Head flange, Clevis (Used for changing the port location by 90) Mounting Male rod end Female rod end 0.2 J 0.29 J 0.46 J 0.84 J 1.4 J 2.38 J 4.13 J 6.93 J Symbol Specification Allowable kinetic energy 0.11 J 0.18 J 0.29 J 0.52 J 0.91 J 1.54 J 2.71 J 4.54 J -XA Change of rod end shape Operate the cylinder within the allowable kinetic energy.

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

R D CK1 Port side B CLK2 Mounting surface CLKG Port side C CKQ CLKQ Clamp arm position (clockwise viewed from top) Mounting surface Mounting surface Port side Symbol Clamp arm position Symbol Clamp arm position CK CLK CK CLK 180 from the port side Same as the port side D Port side Port side C A CKQ Clamp arm Clamp arm 90 from the port side 270 from the port side Port side Port side B D Clamp

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

B Basic (Double-side bossed) L Axial foot F Rod ange G Head ange C Single clevis D Double clevis U Rod trunnion T Head trunnion E Integrated clevis V Integrated clevis (90) BZ Boss-cut/Basic FZ Boss-cut/Rod ange UZ Boss-cut/Rod trunnion * Air-hydro type: Rc only * No bracket is provided for the female rod end. * A knuckle joint pin is not provided with the single knuckle joint. * Rod end

Cylinder with Lock Double Acting, Single Rod Series CNG ø20, ø25, ø32, ø40

JIS Class 2 Thread tolerance Basic style, Axial foot style, Rod side flange style, Head side flange style, Rod side trunnion style, Head side trunnion style, Clevis style (used for 90 change of port position) CNS Symbol Specifications Mounting -XA Change of rod end shape CLS When the piston is locked, the load weight is limited by the mounting orientation and the operating pressure.

FC2W-X110

/Stainless steel/ Port size Rc1/2 *2 Time taken until the ow rate reaches approximately 90% of the set value relative to the ow rate command value (input signal). *3 Refer to Graphs 1 and 2 for the relationship between the ow rate and the I/O signals. *4 The LED status when an error is detected is summarized in the table below.

FH150

(Including O-ring for element) 5 m 10 m 20 m Model FH150-02 FH150-03 FH150-04 Element size EP910-005N EP910-010N EP910-020N 55 x 90 Note 1) The symbol at the end of the element part no. indicates the hydraulic fluid type. N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion (10 m only) Note 2) Refer to page 528 for micromesh elements.

FH99

(Including O-ring for element) FH FH With relief valve Without relief valve Model Element size 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

FHIA

HOW Replacement Element Part No. 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Element size Port size (Nominal size) 04 (1/2B) 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B) 16 (2B) 20 (2 1/2B), 24 (3B) 28 (3 1/2B), 32 (4B) 65 x 90 85 x 110 100 x 160 120 x 180 140 x 200 180 x 260 EM001H-074N EM101H-074N EM201H-074N EM301H-074N EM401H-074N EM501H-074N EM001H-105N EM101H-105N EM201H-105N EM301H

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392. Fluid temperature [C] 382 A

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

0 q Table accuracy w Size e Max. rotating torque [Nm] r Rotation angle [] Nil H Basic type 10 30 50 LER50 320 Symbol LER10 310 LER30 LER10 Type 0.3 0.2 LER30 1.2 0.8 LER50 10 6.6 Symbol Nil 2 3 K J High precision type High torque Basic External stopper: 180 External stopper: 90 t Motor cable entry y Actuator cable type u Actuator cable length [m] 8 Nil S R Nil 1 3 5 8 A B C Without cable

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Copper brazing (Heat exchanger), Stainless steel, EPDM, Silicone, Bronze, Brass Power supply 3-phase 200/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90