Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

Dual-Rod Cylinder Series CXS

, 20, 25, 32 New New With Air Cushion Series CXS 20, 25, 32 W With End Lock Series CXS 6, 10, 15, 20, 25, 32 Dual-Double-Rod Type Series CXSW 6, 10, 15, 20, 25, 32 Auto Switches Made to Order

Air Cylinder CLA Series Fine Lock Model

fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

Air Slide Table Series MXQ

Weight g 65 65 25 15 15 B side traveling parallelism to A side Refer to Graph 1.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

Pneumatic Positioner IP300/IP3100

OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF. FrG. 1) QW tP3100 METHOD OF OPERATION Signal pressure trom a controlled pressure source enters the lP3l00 positioner through the signal port.

Guide Table Series MGF

Example) In case an MGF63-15 specification is required, a spacer of 15mm is installed in the MGF63-30. Therefore, the total length is same as that of 30mm stroke. MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

High flow rate: Cv factor 0.16 to 2.1 Smaller size: Single valve volume reduced by 15% (Class 3) Manifold length reduced by 18% (Class 3: 5 stations) (P/A comparison) Clip type Quick change coils Clip design makes coil replacement easy Flame resistance Coil size and weight reduced Conforms to UL94 V-0 New compact coil reduces the overall size and weight of the valve Volume 15% Weight 20%

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

High flow rate: Cv factor 0.16 to 2.1 Compact: Single valve volume reduced 15% (Class 3) Clip type Quick change coil Clip design makes coil replacement easy.