COQ2BP

S: B Throo h hole standard A Both ends ta d L Foot mount F Rod side Iia e Head side flan e Type of Auto Switch , No auto SWitch built in (high magnetic Bore Size D Clevis mount . ~ field resIstance ma net 50 50mm P7G 0P10 63 63mrn l'l14C D-P74 80 80mm i P7 D-P75 Cylinder Stroke D-PS P8!

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

MGQ

Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74 47 63.5 16 62 13 16 32 14.5 0 79.5 47.5 8-20-9 10 Series MGQ Bore Size

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Fine lock cylinder, CLM2, Double acting, single rod, 10 mounting options available, Air hydro option available, Auto switch capable

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Fine lock cylinder, CLM2, Double acting, single rod, 10 mounting options available, Air hydro option available, Auto switch capable

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

Economy Valve

Caution Upper cylinder chamber Lower cylinder chamber DIN terminal block Terminal block Sm Sp Ground Terminal no. 1 2 E DIN terminal + Terminal + Applicable cable O.D. Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm REG.

LV50-OMQ0004

[L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] Flow rate [L/min] -25No.LV50***-OMQ0004-F IN side straight pipe length (reference value) Straight pipe length 5 Change of accuracy [%F.S.]

CEx-OMP0016

Allowable kinetic energy E max=0.43 (J) V=Vax1.4=350x1.4=490mm/s W 30 Ev= xV2= x0.492=0.36 (J) 2g 2x9.8 Load factor a5= E = 0.36 =0.84 Emax 0.43 Examination of load factor a5 = 0.84 1 OK With above allowable value, there is no problem on the selection. ML2B25 is selected.

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.