Bearing Style: Ball Bush Bearing, Bore Size: 15mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 30mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -
Bearing Style: Ball Bush Bearing, Bore Size: 15mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -
modular-press-e (except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"
(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"
VQ7 E Europe N North America < Manifold block assembly> This manifold block assembly includes tension bolts for a single station addition. < Manifold block replacement parts > AXT502 1A E Description Material Qty. Part No.
PF-OMK0003CN-E / 1 1.5 *3) 1 1 [] -3No. PF-OMK0003CN-E () () -4No. PF-OMK0003CN-E () * ,UL UL1310 2 UL15852 30[Vrms] (42.4[V ])(2 ) UL JIS B 8392-1 1.1.21.6.2 -5No. PF-OMK0003CN-E * (1 /) FG 49N ) 1 () -6No. PF-OMK0003CN-E *() 6 33 2 () () 10m DC(-)() () -7No. PF-OMK0003CN-E * ( ) () CE 050 -8No. PF-OMK0003CN-E * 523 * -9No. PF-OMK0003CN-E (11 ) -10No.
P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..
P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..
Applicable cylinder D G F H L I C E J K M N Part No.
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17
H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.
~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In . L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIO
Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h