ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Compact Cylinder Series NCQ8

M2 bolt circle M1 W I dia.

Modular Type Lubricator Series AL

J H IN OUT OUT IN OUT OUT A P Min. clearance for maintenance A Min. clearance for maintenance AL10, AL20 AL30, AL40, AL40-06, AL50, AL60 Applicable model Drain cock with barb fitting With drain cock With drain cock Metal bowl Metal bowl with level gauge Metal bowl with drain cock Metal bowl with drain cock Metal bowl with drain cock & level gauge Optional B specifications B B B B B B B Barb

One-touch Fittings Series KQ2

KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .

AIR COMBINATION

AC-OMT0014-A PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-B AC25(B,C)-B AC30(A,B,C,D)-B AC40(A,B,C,D)-B AC50(A,B)-B AC55(B)-B AC60(A,B)-B Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1118 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 19 7.

HRX-OM-R005

HRS 20 A 060 Cooling capacity Option 060 4900W/5900W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit(1) 1) Unit : MPa/ (degree Celsius) Piping thread type Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase AC200 to 230V(50/60Hz) N NPT

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

VFN2000N

Cylinder ports should be NAMUR hole pattern. 100/200 V (50/60 Hz) 24 V 15 to +10% of rated voltage Class B or equivalent 5.0 VA/60 Hz, 5.6 VA/50 Hz 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz 1.8 W Grommet, Grommet terminal, Conduit terminal, DIN terminal Note 1) Use dry-air at low temperature. Note 2) Use turbine oil Class1 (ISO VG32), if lubricated.

Clean Regulator/Fluororesin Type

2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.