SMC Corporation of America
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([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] OFF [-] [F20] -45No.PF-OMN0011CN-C [F22] 5 V20 mA [F22] [AnA] [AnA][-] tEMP FLoW [F22] ON OFF -46No.PF-OMN0011CN-C OFF ON 5 V 20 mA 10% [ V ] 4 L/min 1~5 V [F22] 5.6 V110 -47No.PF-OMN0011CN-C [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200

Approx. 1.00 mm Colours Brown, blue, black, white, grey Sheath Material Heat and oil resistant plastic Finished O.D. 3.5 mm -63No.LFE*-OMZ0013 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out

() 200 ms() 1.5 s() 0.5F.S. 1 digit 3+1/2 7 2 (/)5 /1s OUT1ON ()OUT2ON () IP40 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) 0.5%F.S.(25 ) 5P 4P PBTPBT 30 g() CEUL/CSA 12 5 2 -32No.IZ*-OMU0031 (ZS-28-A) 2 0.2 mm 0.58 mm 1.12 mm 4.1 -33No.IZ*-OMU0031 0.56 mm R R2 2 (n ) <> <> 31Xn +3.5X(n -1) 31Xn +3.5X(n -1) -34No.IZ*-OMU0031 Revision history A 4-14-1, Sotokanda

.: ZVB-P1A) Hose band (Material: SUS) Exhaust duct hose (Material: PVC) (*) Connection inside diameter Duct collector bag filtration rating 10m (Material: Polyester) Hose band (Material: SUS) -12- 2.5 Offset Voltage and Discharge Time Ionizer 100 180 200 Actual measurement values of the static elimination performance at the points 1 to 6 are shown below.

Discharge capability 1) Flow-rate characteristics PB1013A Flow-rate characteristics (5Hz) PB1013A flow-rate characteristics (When operated at PB1013A5Hz 5H ) 0.7 Discharge pressure (MPa) 0.6 SUP=0.7MPa 0.5 MPa SUP=0.5MPa 0.4 SUP=0.35MPa 0.3 SUP=0.2MPa 0.2 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution The above flow characteristic graph is for clean water (viscosity

Discharge capability 1) Flow-rate characteristics PB1313A Flow-rate characteristics (5Hz) PB1313A5Hz 0.5 SUP=0.5MPa Discharge pressure (MPa) 0.4 SUP=0.4MPa MPa 0.3 SUP=0.3MPa 0.2 SUP=0.2MPa 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution -The above flow characteristic graph is for clean water (viscosity 1mPas, specific gravity 1.0).

VCC12(D)-00 (2 port valve) VCC13-00 (3 port valve) Full length: 44.8 to 45.1 0.2 Full length: 54.6 to 54.9 0.4 Except face seal (O-ring) Except face seal (O-ring) Tighten the screw until it hits the body by pressing the orifice body with approx. 100 to 200 N of force. ( Additional tightening is not necessary.)

To use the power of the device, the total load current must be 200 mA or less. 2 : Refer to 2.4.2 Contact output signal 4 to 6. 2.2 Communication specification HRL Series 2-2 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication Table 2.2-3 Contact input/output communicatin /Analog output pin number PIN No.

To use the power of the device, the total load current must be 200 mA or less. 2 : Refer to 2.4.2 Contact output signal 4 to 6. 3 : For option D1 CH1 Electric conductivity control, it can be set.

To use the power of the product, the total load current must be 200 mA or less. 2.2 Communication specification HRLE Series 2-2 HRX-OM-Z015 Chapter 2 Contact input / output communication Table 2-4 Contact input/output communication terminal number PIN No.

(No indication on display) Sets target temp. for control. 0.0 to 50.0C (0.1C) 25.0 1.0 to 60.0C (0.1C) 60.0 -9.99 to 9.99C (0.01C) 0.00 -9.9 to 49.0C (0.1C) -9.9 10 to 999% (1%) 200 0.0 to 10.0C (0.1C) 1.5 0.0 to 10.0C (0.1C) 1.5 2 PB Range Sets PB (Proportional Band) range used for PID control. 0.3 to 9.9C (0.1C) 3.0 0.0 to 99.9sec (0.1sec) 0.0 None, Odd, Even None On, Off Off 600, 1200,

25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 160 200

(Table 1) Table 1 Example of applicable fitting: Male connector (O-ring parallel thread) (Made by Swegelok) Cylinder Fitting thread size for Example of Piping tube OD (inch) model piping applicable fitting CYV15 5/16-24 UNF SS-200-1-OR 1/8 CYV32 7/16-20 UNF SS-400-1-OR 1/4 2.