FH99

(Including O-ring for element) FH FH With relief valve Without relief valve Model Element size 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

FHIA

HOW Replacement Element Part No. 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Element size Port size (Nominal size) 04 (1/2B) 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B) 16 (2B) 20 (2 1/2B), 24 (3B) 28 (3 1/2B), 32 (4B) 65 x 90 85 x 110 100 x 160 120 x 180 140 x 200 180 x 260 EM001H-074N EM101H-074N EM201H-074N EM301H-074N EM401H-074N EM501H-074N EM001H-105N EM101H-105N EM201H-105N EM301H

HAA

Symbol Description Port size Nil Symbol Size Applicable model D Auto drain F Dust-protecting filter S Mounting bench 3 4 06 Rp socket 10 1B union 14 1 union HAA7 HAA15 HAA22, 37 1 2B Source voltage Symbol Voltage Applicable model 1 2 3 Single phase 100 VAC Single phase 200 VAC Three phase 200 VAC HAA7, 15 HAA7 HAA15, 22, 37 How to Calculate Outlet Air Temperature Outlet air temperature can

Thermo-chiller/

Pipe thread type Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Power supply Single-phase 200 to 230 VAC (50/60 Hz) 9 A

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

AS

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Also, when exceeding the air cushion stroke ranges on page 1211, the piston speed should be 100 to 200 mm/s. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1211.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Also, when exceeding the air cushion stroke ranges on page 1346, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

Thermo-chiller

INFORMATION Thermo-chiller Air-cooled 460 V Type Standard Type (Pending for UL Standards) How to Order HRS 200 A 46 S Option Cooling capacity Nil None A With caster adjuster-foot 200 20.5 kW Cooling method A Air-cooled refrigeration K1 With uid ll port Pipe thread type 1 This is a manual fluid fill port that is different from the automatic fluid fill port.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Heatless Air Dryer ID Series

VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

LEY25: 200 mm or less LEY32: 100 mm or less 3 Rod ange is not available for the LEY25/32 with stroke 50 mm or less and motor option With lock. 4 Head ange is not available for the LEY32. Nil Ends tapped/ Body bottom tapped 2 L Foot F Rod ange 2 3 G Head ange 2 4 Applicable Stroke Table : Standard For auto switches, refer to page 507.

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.