LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Applicable stroke table )Standard Stroke Manufacturable stroke range [mm] Model 600 500 400 300 200 100 900 700 800 1000 LEFS16 LEFS25 LEFS32 LEFS40 ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) 100 to 400 100 to 600 100 to 800 200 to 1000 ) ) ) ) ) ) ) ) ) ) ) ) Consult with SMC for non-standard strokes as they are produced as special orders.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa ARG20 Rc1/4 ARG30 Rc3/8 ARG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 500 1000 1500 0 1000 2000 3000 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

CNG

Graph (1) 10 500 st 600 st 700 st 700 st 500 st 600 st 400 st 400 st 4 5 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2 100 st [Example] Example) 1 0.4 0.5 0.3 V' 0.2 300 0.1 V W 100 200 1000 400 500 Maximum speed: V (mm/s) Cylinder stroke Movement distance of load Step (2) Find the bore size.

HRX-OM-W004

signal 2 Delay timer / Electric conductivity set value* 2 450 Circulating fluid temperature range rise, the monitoring method of drop alarm RNST / 0 250 DIHI INP2 DELAY DISP / / WRM TEMP OUT ALARM Contact input signal 2 OFF Detection timer / NOT TEMP READY alarm OFF 0 Electric conductivity set value hysteresis*2 / 50 Circulating fluid temp monitoring start time PUMPF TEMP READY ALARM 600

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

90

Flow Rate Characteristics Relief Characteristics IR1020-01-A Supply pressure: 0.7 MPa IR1020-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

ITVH

Flat bracket assembly (including mounting screws) P398020-600 L-bracket assembly (including mounting screws) P398020-601 ARJ Power cable connector Straight type 3 m P398020-500-3 Right angle type 3 m P398020-501-3 AR425 to 935 Straight type cable connector Right angle type cable connector ARX AMR ARM L-bracket ARP Flat bracket IR-A Mounting screw for the body Mounting screw for the body Right

25

700 800 900 1000 0 100 200 300 400 500 600 Flow rate (L/min [ANR]) Flow rate (L/min [ANR]) How to measure b) Both sides air supply (Connecting tube: O.D. 6 x I.D. 4) (IZS4-820, 1120, 1300) a) Single side air supply (Connecting tube: O.D. 6 x I.D. 4) (IZS4-340, 400, 460, 580, 640) Air supply measurement Pressure measurement Air supply measurement Pressure measurement 10 mm 10 mm 10 mm c)

Fieldbus System

Analog Output Unit EX600-AYA Model Output type Current output Voltage output Output connector M12 (5-pin) socket Note) Output channel 2 channels (1 channel/connector) Supplied voltage 24 VDC Max. load current 0.5 A/connector Protection Short-circuit protection Output signal range EX600-AYA 12 bit resolution 0 to 20 mA, 4 to 20 mA 0 to 10 V, 1 to 5 V, 0 to 5 V 600 or less 1 k or more Load

energy saving effect

grounding cable) R8-5 M5 A HRSH100--40 20 A 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH150--40 HRSH200--40 HRSH250--40 3-phase 380 to 415 VAC (50/60 Hz) 30 A Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600

53

3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH090-ll-40 3-phase 380 to 415 VAC (50/60 Hz) 20 A Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Series 12-REA Sine rodless cylinder

, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.