Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

SU) S 2 YA View With internal shock absorber MSQAR MSQBR High precision type MSQAA 11221122DA M5 x 0.8 depth (Vacuum suction port) 1122DB DC (HD) HB HA HE (Max.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Tightening torque (Nm) 0.8 to 1.2 Hexagon socket head cap screw 11-6-4 5 Mini-rotary Actuator Rack & Pinion Style Series CRJ How to Order CRB2 Rotating angle CRBU2 90 100 180 190 90 100 180 190 CRB1 MSU CRJ B 05 90 E M9B S Basic type CRJ CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Other dimensions are the same as the grommet type. 3-7-28 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS3250(S)-01 02 3 position closed center: VZS3350(S)-01 02 3 position exhaust center: VZS3450(S)-01 02 3 position pressure center: VZS3550

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

RSH

Option (1) D C S Without option With locking mechanism With cancel cap With lever detection switch Action (2) D B T Double acting (1) The options can be combined, provided that the priority order is indicated as D, C, S.

RLQ

) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion Needle Adjustment Warning 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated

S

Closed Valve A Variety Of Actuator Types Available Robust Design T E C H N I C A L SPECIFICATIONS Fluid Air Operating Pressure 0 ~ 9.9 Bar / 0 ~ 144PSI Ambient and Fluid Temperature 5 ~ 60C / 41 ~ 140F Effective Orifice (Cv Ffactor) 6mm2(0.33) Recommended Lubricant Turbine Oil #1 (ISO VG32) Port Size 18 H O W T O O R D E R (N)VM800 V A LV E APPLICATIONS (N)VM830 01 3 3 Ports N O O F P O R T S

S

Note 2) For the S0700 series, SI unit models EX180-SDN1, EX180-SDN2, or EX180-SMJ1 cannot be selected as S kit (SDQl, SDV2).