DOC1023125

Accessories Table spacerParallel motor only Model Part name QTY EQFS25(L/R) Table spacer 1 EQFS32(L/R) EQFS40(L/R) Optional parts (sold separately) Power supply cable Parallel I/O cable Communication cable USB cable Setup software Refer to 9 Optional parts (sold separately) for details of optional parts. 28 - Installation and Initial Setting .

High performance type Step Motor Controller (Servo/24 VDC)

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

JXCx-OMT0034CN

Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8] 1 030 10% Bit[70] 1 0255 mm/s RWwn+7 1) Bit[F8] 1 030 10% Bit[70] H RWwn+8 1) 2 065500 0.01mm Bit[F8] L ID2 RWwn+917 ID1 ID3 RWwn+1826 ID1 ID4 RWwn+2735 ID1 ID5 RWwn+3644 ID1

SI unit for CC-Link

The solenoid Only LED of the Solenoid valve valve does not solenoid valve failure work correctly is ON PWR LED is Refer to OFF reference No.1 Yes No PWR(V) LED is Refer to OFF reference No.2 flashes Refer to L ERR LED L RUN LED is reference No.3 flashes OFF OFF or ON OFF Refer to L ERR LED is reference No.4 OFF ON Refer to reference No.5 Flashes or ON Refer to L ERR LED reference No.6 flashes

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

CE

Lead Wire Length Lead wire length designation (example) D-A73 L Lead wire length Nil L Z NNote) 0.5m 3m 5m None Note) Applies only to D C type connector switches.

Check Valve Series AK 1

min (ANR)) Flow rate (l/min (ANR)) Thread type Nil N F Rc NPT G AK4000-03/-04 AK6000-06/-10 Port size 0.5 MPa 0.5 MPa Port size Applicable series AK2000 AK2000/4000 AK4000 AK4000 AK6000 AK6000 Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa 0.3 MPa 0.3 MPa 0.7 MPa 0.7 MPa 01 02 03 04 06 10 1 8 1 4 3 8 1 2 3 4 1 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 15-14-1 2 Series AK Construction

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Stainless steel specifications (SUS303) Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

ZU

Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 93 93 93 93 Vacuum pressure Air consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10 67 Air

S

(Total Travel) From free position to total travel position I f t h e s e v a l v e s a r e u s e d f o r g u a r d i n g o r s a f e t y i n t e r l o c k s y s t e m s , i n s t a l l a t i o n a n d application should be as per BS5304: 1988.

RSH/RS1H

RSH RS1H 30 50 Z73 D L Bore size Number of auto switches 50mm 63mm 80mm 50 63 80 Thread type Nil S 2 pcs. 1 pc.