SMC Corporation of America
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The auto switch could activate unintentionally if a shield plate is not used. 20Data Table (1) L d Bore size (mm) MXU6 MXU10 MXU16 21 5 25 5 35 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 8-30-1.

4 #0 Component Parts Description Material Note No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 21 22 Description Material Note No. 23 24 25 26 27 29 Cylinder tube Head cover Cushion boss Piston yoke Piston End cover Wear ring Head plate Cushion needle Stopper Belt separator Guide roller Parallel pin Belt clamp Bearing Spacer Spring pin Seal magnet Aluminum alloy Aluminum alloy Polyacetal Aluminum alloy

C2SiH8 Nitric Oxide Perfluoro-butadiene NO C4F6 Phosphorous Pentafluoride Octafluorocyclopentene PF5 C5F8 Phosphine Halocarbon 12B2 PH3 CBr2F2 Sulfur Tetrafluoride Trimethylsilane SF4 (CH3)3SiH Sulfur Hexafluoride Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

Green Gray Tan Symbol B R G BU W Y YR N S PU BR GD GR T S S S S S S S S S S = Standard, all other length color combinations are available by special order Tube Sizes 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 21

Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 Dimensions Model through D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-04J TMH-01J TMH-03J TMH-05 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.8 18.2 21.2 22 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J

(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.

KS KX Tubing size Metric size (TU series) Inch size (TIUB series) KM TU0212 TU0425 TU0604 TU0805 TU1065 TU1208 TU1610 TIUB01 TIUB05 TIUB07 TIUB11 TIUB13 Model Additional 21 new colors. Tubing O.D. (mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

7 20 Hexagon socket head cap screw Carbon steel t 21 Hexagon nut Carbon steel @1 22 Hexagon bolt Carbon steel y 23 Spring washer Carbon steel 24 O-ring !

Change of fluid passage Caution Port size 12(PA) 23(AR) 21(AP) 32(RA) 1/2 3/4 M4 x 0.7 Port size Effective area (mm2) 12(PA) 23(AR) 1 N.C. N.O. Dimensions Please note that the pressure in the valve should be exahusted when changing the fluid passage. Loosen the hexagon socket head cap screw M4 x 0.7.

Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200