Sensor: None, Output: B (PNP Open Collector), Unit: w/Unit Switching Function, Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: M (Fixed SI Unit), Operation Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Out Specification: D (Out 1: NPN, Out 2: Analog to 20 mA), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only), Bracket: R (w/Bracket)

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: N (None), Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: T (Panel Mount Adapter

Filter), Vacuum Pressure Switch Unit Specs: M (Fixed SI Unit), Vacuum Pressure Switch Lead Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Fitting, P Port: 5 [ø4 (Elbow)]

Antistatic Tubing TA  Series

1208 12 8 BU C B Blue (Translucent) Clear (Material color) M-3AU-2, M-3AU-4 M-5AU-2, M-5AU-4 M-5AU-6, M-5H-4 M-5H-6 MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 Black (Translucent) 500

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: G (OUT1: NPN; OUT2: External Input), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None, Calibration Certificate: A (Calibration Certificate), Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 14 (1 1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

I

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Slit Valve

L motion structure Gate open Gate blocked Gate clamped (seal) Clamp Upward The adoption of a wiper decreases the intrusion of foreign objects, resulting from wafer damage and or other sources.

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 12 (1 1/4), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5Compressed air0.3 to 0.85 5 to 55 5 to 55 206250120.7252525?

PA300/500/700

N.O. 101.2 kPa to 0.2 VPA344 544 744 Pilot pressure (MPa) Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Same as operating pressure (Min. 0.2 MPa) 10 to 50C (No freezing. Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C)

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H