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Insufficient bolt tightening After stopping air and re-tighten the bolts. 13 No.VQ1000V-OMM0002-B S Revision history A Safety Instructions oY B How to calculate flow rate: Correction of errata VZ 1st printing : MW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

OMW0001 13 No.VQ7-6-OMW0001 14 No.VQ7-6-OMW0001 15 No.VQ7-6-OMW0001 16 No.VQ7-6-OMW0001 17 No.VQ7-6-OMW0001 18 No.VQ7-6-OMW0001 19 No.VQ7-6-OMW0001 20 No.VQ7-6-OMW0001 21 No.VQ7-6-OMW0001 22 No.VQ7-6-OMW0001 23 No.VQ7-6-OMW0001 24 No.VQ7-6-OMW0001 25 No.VQ7-6-OMW0001 26 No.VQ7-6-OMW0001 27 No.VQ7-6-OMW0001 28 No.VQ7-6-OMW0001 29 No.VQ7-6-OMW0001 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 17 No.VQZ100V-OMK0002-B S Record of changes A Renewal MY B Safety Instructions oY 1st printing : KV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2007-2018 SMC Corporation All Rights Reserved No.PS-OMH0003-F

Construction A 29 Revision history A: All revised contents B: All revised contents 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

IMar. 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

Outside dimensions of CE1B12 Outside dimensions of CE1B20 Outside dimensions of CE1B32 Outside dimensions of CE1B40 Outside dimensions of CE1B50 Outside dimensions of CE1B63 Revision history ARevised in July 2000 BRevised in January 2001 CRevised in July 2011 DRevised in May 2013 ERevised in August 2017 FRevised in October 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81

Installation distance: 50mm 3 2 Installation distance: 10 mm 1 Installation distance: 25mm Installation distance: 25mm 0 -2000 -1500 -1000 -500 0 500 1000 1500 2000 Charged potential [V] Sensor head Installation Detection range distance (mm) (mm) Installation 10 45 distance 25 100 Detection port 50 180 Detection range 30 Doc.No.IZ-OMK0015D Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Holding force of trunnion Tube bore Trunnion part Holding force of number trunnion 32 V5032P 3500N 40 V5040P 5000N 50 V5050P 5000N 63 V5063P 11000N 80 V5080P 11000N 100 V5100P 14000N 125 V5125P 14000N Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without

valve 2 10 Tie-rod 4 11 Retaining ring 2 A 12 Spring washer 8 13 Tie-rod nut 8 14 Wear ring 1 15 Cushion seal 2 16 Rod seal 1 17 Piston seal 1 18 Cushion valve seal 2 19 Cylinder tube gasket 2 20 Piston gasket 1 21 Rod end nut 1 22 Magnet (1) 34 Revision history A XC5 delete Match sentences with the catalog B Corrected the part number of the wear ring 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

UW 1st printing: SS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 19 XSA-OMS0001-A

Net weight Part no. 5g GR-L-005 10g GR-L-010 150g GR-L-150 23 Revision history Revised by reviewing the description. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights

Appropriate tightening torque VQ4000 : 0.8 to 1.2Nm VQ5000 : 1.0 to 1.8Nm 17 VQ4000V-OMV0001 Revision history 1st Printing :Wo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All

3 Cylinder tube 4 Piston 5 Piston rod 6 Bushing 7 Cushion ring A 8 Cushion ring B 9 Cushion needle 10 Seal retainer 11 Retaining ring 12 Rod seal 13 Piston seal 14 Cushion seal 15 Cushion ring gasket 16 Needle seal 17 Wear ring 18 Bushing for clevis 19 Mounting nut 20 Rod end nut 21 Plastic magnet For CDM2 27 - Revision history AAll revised contents 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

. -16- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

. -17- Revision history SZ Revised to the new format. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

F Model No. label L Dain port ERR03 Back-up data error Stop 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

If any trouble should happen with the uni,please send it back to the supplier for repair or replacement. 8 No.SYJ5000-OMJ0001-A Revision history A Safety Instructions oP 1st printing : JS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 14 No.VF1000-OMN0002-A S Revision history A Safety Instructions PP 1st printing : oQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

. -15VFR2000-OMH0002-A S Revision history A Safety instructions PP 1st printing: 90.4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved VFR2000-OMH0002-A