EXxx-OMN0029CN

4 EX600-SDNA (24 ) 0 3 SI EX600-SDNA (16 ) 0 2 EX600-SDNA (8 ) 0 1 EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYE1 (24 ) 0 3 EX600-DYF (16 ) 0 2 EX600-DME (8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB

Support Guide/11-LEFG Series

1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg

Wedge Cam Operation Provides

/Long stroke model 18.6 2-M5 X 0.8 thread depth 8 (Mounting thread) 24 4H9 depth1.5 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 -0.2 Closed 16 32 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 100 Groove position for

CY1

9 @0 !8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

EXxx-OMQ0015CN

1 0 0 4 PLC : 032767 +0 +32767 PLC : 3276865535 -0 -32767 : 15 V 50001000 4VPLC 4000 -50No.EX-OMQ0015CN (1) [H.T.]

CNA

72.5 31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5 50 50 9.5 86.5 2 10.5 0 78 35 4 2 8.5 77 0 0.5 11.5 1.5 43.5 78.5 77 42.5 0 0 86 3.5 42 49 63 63 13 93.5 4.5 13 2 85 42 6.5 5.5 12 91 1.5 3 14 5 50.5 85.5 91 48 2.5 3.5 93 6 50 55.5 80 80 15.5 102 8 16.5 4.5 93.5 50 10 8 14.5 107 4 6.5 17.5 7.5 59 94 107 54 6 6 101.5 9.5 57.5 63 100 100 18 112 9.5 18 7 104 57.5 11.5 10.5

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

Wedge Cam Operation Gripper Series MHK2

Scale: 37% (mm) 9 2-M3 X 0.5 thread 4 deep 15 3H9 3 deep +0.030 0 2-M3 X 0.5 thread 6 deep 13H9 1.5 deep +0.043 0 4-M4 X 0.7 thread 8 deep Bottom hole dia. 3.4 through-hole 0 -0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 deep +0.030 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Attachment mounting thread) M3 X 0.5 (Finger closing

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

MHF2

9 Mounting screw 12-3-11 12 Series MHF2 Dimensions MHF2-8D 2.5H9 +0.025 0 depth 2.5 16 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3 28.3 3.4 36 32 2-M3 x 0.5 thread depth 4 15.8 22 Mounting thread 5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use

MHF2

MHT E MHY 13 25 25 30 MHW 41 MRHQ E 4-5.2 through (Mounting hole) 0 -0.1 Misc. 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread

Thermo-chiller/Rack Mount Type

0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

DOC1003626

(Example 1) The least significant bit was a 1. 0 0 0 0 0 0 0 1 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top Not execute ExOR 3.10 Checksum calculation method HRS400-A-46 3-10 DOC1003626 Chapter 3 Serial communication

10

0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16 12 12 12.5 12.5 17.5 17.5

MXQ

0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Series VQ Base Mounted Metal Seal/Rubber Seal

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

HRX-OM-Z015

lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR HRLE Series 3.10 Checksum calculation method 3-9 HRX-OM-Z015 Chapter 3 Serial communication Calculation example Example) Change circulating fluid set temperature

IIIIIIIIII

Blue 0-010-062 0-010-125 .012 Green 0-012-062 0-012-125 .014 Orange 0-014-062 0-014-125 .016 Grey 0-016-062 0-016-125 .017 Brown 0-017-062 0-017-125 .019 Red 0-019-062 0-019-125 .020 Dk. Blue 0-020-062 0-020-125 .025 Black 0-025-062 0-025-125 .030 Beige 0-030-062 0-030-125 .035 Dk.

HRX-OM-W069

bit was a 1. 0 0 0 0 0 0 0 1 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR 3.10 Checksum calculation method HRL Series 3-10 HRX-OM-W069 Chapter 3 Serial communication Calculation example

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%