Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VZS2000

Other dimensions are the same as the grommet type. 3-7-12 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center:

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Silencer Series AN

I O N S SERIES NAN SILENCER S Y M B O L S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid Temperature 5~60C / 40~140F H O W T O O R D E R

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

S S OUT IN OUT IN IN IN Bottom With display rotating function One-touch fitting 8 Female thread Rc, NPT, G 1/4 OUT IN OUT IN S S IN 1 IN 1 Functions Bypass structure Sensor unit Protruding part (Refer to page 15 and 16 for details.)

3 Port Solenoid Valve

(Double solenoid) S D Rated voltage 24 VDC 12 VDC 5 6 Common Specification +COM. COM.

CKZ2N

T U 8F7 +0.013 +0.028 through 11 through 5 16 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 V W X R40 45 155 0.05 M10 x 1.5 1 16 1 R37 30 10.5 R9 30 26 NAAMS code Weight kg (lbs) A B C D E F G H I J K L M N O P Q R S T U V W X Part no.

Air Cylinder/Standard Type: Double Acting, Single Rod Series CG1

CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS 20 25 32 40 CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS NBR Piston seal !8 Disassembly/Replacement Caution Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 1. Do not replace the bushings. The bushings are press-fit.

ZB-OM00301

2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig.

Smooth Cylinder Series CQSY

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

Refrigerated Air dryer Series IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

Guide Table Series MGF

Bore size (mm) Allowable moment (Nm) 10 40 110 40 63 100 Values at cylinder speed of 100mm/s. Mounting from two directions is possible. Mounting from top Mounting from bottom Typical application Change of transfer direction Positioning Features 2 40, 63, 100 Series MGF Guide Table How to Order 63 30 Z73 MGF Guide Table Number of auto switches 2 pcs. Nil S 1 pc.

5 Port Solenoid Valve Series SV

Total stroke time t Stroke L Stroke mm Speed d% d% Speed at the end Stroke Speed at the end u Time s SOL: ON (OFF) IV Air Cylinder Drive Systems Total Stroke Time and Speed at the End Series SV Series SV3000 Applicable bore size: 50, 63, 80, 100 Applicable related components Total stroke time s Tubing Speed controller Solenoid valve Silencer 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 400

HRX-OM-M091

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Remodeled

Specifications Model MGP-Z MGP-AZ Basic type With air cushion Action Double acting Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 12, 16 0.12MPa 16 0.15MPa 20 to 100 0.1MPa 20 to 100 0.12MPa Ambient and fluid temperature -10 to 60 (No freezing 12 to 63 50 to 500mm/s 16 to 63 50 to 500mm/s Piston speed 80, 100 50 to 400mm/s 80, 100 50

08-cg1-e

CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS 20 25 32 40 CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS NBR Piston seal !8 Disassembly/Replacement Caution Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 1. Do not replace the bushings. The bushings are press-fit.

Compact Guide Cylinder

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.