(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525

/OTHER), .20943 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5Compressed air0.3 to 0.85 5 to 55 5 to 55 206250120.7252525

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5HCompressed air0.3 to 0.85 5 to 55 5 to 55 15565060.7252525

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5HCompressed air0.3 to 0.85 5 to 55 5 to 55 15565060.7252525

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5Compressed air0.3 to 0.85 5 to 55 5 to 55 206250120.7252525

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

/OTHER), .54526 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.

/OTHER), .50706 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

/OTHER), .45093 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

/OTHER), .53252 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

/OTHER), .20943 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.