5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CRQ2

Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.

HRX-OM-M090

4 to 8-8.

HRX-OM-Y098

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

8 8 9.5 6.8 6.8 6.9 8.1 #8-32UNC #8-32-UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke sizes, through-hole is threaded over the entire length.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

end adjuster) 14 14 J I 13 Vacuum suction port Rc1/8 (NPT1/8, G1/8) 7.5 Max. 14 (Retraction end adjuster) 5H9 ( ) depth 5 +0.030 0 12 48 36 Operating port 2 x Rc1/8 (NPT1/8, G1/8) GA HA 5H9 ( ) depth 5 +0.030 0 6 NN x M6 x 1 thread depth 12 A B 1.5 29 11 11 5.1 5.1 9.5 A B 26 10.5 26 10.5 H G (NN 1) x H B-B A-A (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17

Micro Mechanical Valve Series VM1000

8 P.T.

MXS

8 !

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

CRB2/CRBU2/CRB1

P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Series Vane type Unit part no.

HRX-OM-R016

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without silencer) Box type: Type B Body ported

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

HRX-OM-W060

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100A20 CH1 . 8-7 8.4.2 HRL200A20 CH1 . 8-7 8.4.3 HRL300A20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100A20 CH1 . 8-9 8.5.2 HRL200A20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20 CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13 8.8 Daily

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64