High Vacuum L Type Valve

equivalent) Nut (Material: SUS304 or equivalent) (Shaft) Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46

LEYx-OMZ0015

LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60 40 70 80 200 Work load [kg] Vertical 8 16 30 9 19 37 12 24 46

VQZ Series

.:3.5 to 7 (Reference) 0.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Part no. for One-fitting for 1(P) port and Silencer for 3(R2,R), 5(R1) port. (2) Silencer for 3(R2,R), 5(R1) port Series (1) One-touch fitting for 1(P) port Silencer One-touch fitting VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32for 6 VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S The

High Vacuum L Type Valve

standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Main pumping 46

E-MY2_E_D

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000

REGULATOR

27.5 27.5 0 28 28.5 37.5 64 37.5 65 1/43/8 M38X1.5 AR30K-B 1/8 53 85.6 30.7 29.4 29.4 3.5 28 30.4 37.5 65.9 37.5 66.9 1/43/81/2 M42X1.5 AR40K-B 1/8 70 91.7 35.8 33.8 33.8 3.5 28 34.8 42.5 71.3 42.5 71.3 3/4 M42X1.5 AR40K-06-B 1/8 75 93.2 35.8 33.8 33.8 3 28 34.8 42.5 71.3 42.5 71.3 3/41 M62X1.5 AR50K-B 1/8 90 125 43 43.3 43.3 3.2 28 44.3 42.5 80.8 42.5 80.8 1 M62X1.5 AR60K-B 1/8 95 130 46

AIR COMBINATION

35 7 14 4 41 AC30B-B 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 1/43/81/2 AC40B-06-B 1/8 155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 3/4 AC50B-B 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 3/41 AC55B-B 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 1 1 AC60B-B 1/8 196.2 234.1 46

Series MLGP

D (mm) Bore size B C Hexagon socket A 2d or more (mm) (mm) MLGPM MLGPL (mm) (mm) Head cap screw 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M61.0 32 98 34 78 22 18 M81.25 40 106 40 86 22 18 M81.25 50 130 46 110 27 22 M101.5 63 142 58 124 27 22 M101.5 Bypass port dia. 80 180 54 156 33 28 M121.75 100 210 62 188 39 33 M142.0 10 - 8) Depending on the operating condition, change the position

Mini Rotary Actuator

Auto Switch Rotation range / Actuation / most sensitive position D-M9 auto switch D-F8 auto switch Size Rotating Operation Operation A B angle Hysteresis Hysteresis angle angle (mm) (mm) angle angle m m 90 20.5 16.5 05 46 10 20 10 180 23.2 19.2 90 22.4 18.4 1 41 10 15 10 180 25.6 21.6 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating

Electric Actuator Miniature Rod Type Miniature Slide table Type

(Stroke end etc.) 46 - No. Phenomenon Cause Countermeasure 2 Alarm for Pushing ALM 1) For the pushing operation, the Check the step data. /code: 1-096 is generated. position, target start-pushing /See 7.3 Caution (13) on p.44 position, is not set correctly. Controller version /SV1.0 or later 1. Input the reset signal.

Electric Actuator / Low profile slider type

. -46- No. Phenomenon Cause Countermeasure 1) Command invalid (unregistered) step data.

XMA/XYA Series

for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMA KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46

Compact Guide Cylinder

1.25 6.7 11 9 Rc1/8 NPT1/8 G1/8 16 16.5 41 28 92 42 106 82 98 72 50 12 140 M8 29.5 29.5 43 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 13 19 49 35 115 52.5 133 104 122 92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16 21 40 24 48 124 34 46

180

or main body. 709 MHY2 Series Dimensions MHY2-25D 2 x M6 x 1 thread depth 10 Pin hole positioning (Mounting thread) 16 5 23 50 4H9 + 0.030 depth4 0 4 x M5 x 0.8 through (Thread for mounting attachment) 10 4 x M6 x 1 thread depth 12 12 0.005 0.025 (Mounting thread) 6 12 2 x 6.6 through 2 x M6 x 1 thread depth 12 22.5 (Mounting hole) (Mounting thread) (Limted area for mounting attachment) 46

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

interference with the attachment or main body. 12-10-13 13 Series MHY2 Dimensions MHY2-25D 2-M6 x 1 thread depth 10 (Mounting hole) Pin hole positioning 16 5 23 50 4H9 + 0.030 depth4 0 4-M5 x 0.8 (Thread for mounting attachment) 10 4-M6 x 1 thread depth 12 12 0.005 0.025 (Mounting hole) 6 12 26.6 2-M6 x 1 thread depth 12 22.5 (Mounting thread) (Mounting hole) (Limted area for mounting attachment) 46

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46

Clean Gas Filter

Characteristics Fluid: Compressed air Inlet temperature: 20C Dimensions SFA100/101, SFA200/201, SFA300/301 SFA10 Inlet pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46

2–4

G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46