Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

or less VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5

Technical Data   CRVPro4 CRVpro8 CRVpro16 Free Air Displacement @ 60 Hz, cfm (L/min) 2.8 (78) 5.6 (158) 12.8 (363) Ultimate Pressure, torr 1.5x10?³ 1.5x10?³ 2x10?

FQ1

Takes only 60 seconds for element replacement. Element replacement in only 60 seconds Replacement in less than two minutes is possible including removal of liquid. Removing liquid . 45 seconds Removing the case Replacing the element . 51 seconds Installing the case Air vent G1/4 Cover (SUS304) S.O.E. (Single Open Element) can be installed.

30

18.2 18 22.5 22.8 18.9 17.6 25.9 19.8 18.5 28.1 23 12 4 3.9 7.9 7.8 9.1 14.7 13 13.5 24 18.6 20 22 39.2 26 20.2 35.3 43.6 40.3 M5 x 0.8 M5 x 0.8 1/8 4 12.6 Applicable tube D M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12 6 13.6 20.6 M A 14 L 24.7 22.9 23.1 25.6 27.5 Connection thread 14 8 16.1 23.3 17 (R) H 17.2 17 10 17 39 24 22 D Applicable tube 46 30.6 19 12 18.6 60

IZx-OMT0049

Alarms for IZT41 and IZT42 . 60 4-5-3. Details of the alarms . 61 5. Performance . 63 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 63 5-2. Potential amplitude . 65 5-3. Static neutralization range . 66 5-4. Flow Pressure characteristics . 69 6. Dimensions . 70 7. Specifications . 79 8. Troubleshooting . 81 9.

Digital Pressure Switch

2 Setting of OUT2 36 F 3 Digital filter setting 38 F 4 Auto-preset function 39 F 5 FUNC terminal setting 41 F 6 Fine adjustment of display value 43 F10 Sub display setting 44 F11 Display resolution setting 50 F80 Power saving mode 51 F81 Security code 52 F82 Input of line name 54 F90 Setting of all functions 55 F96 Input signal check 57 F97 Selection of copy function 58 F98 Output check 60

Digital Pressure Switch

filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 41 F10 Sub display setting 42 F11 Display resolution setting 48 F80 Power saving mode 49 F81 Security code 50 F82 Input of line name 52 F90 Setting of all functions 53 F96 Input signal check 55 F97 Selection of copy function 56 F98 Output check 58 F99 Reset to default settings 60

LZ-OM003xx

(Operation 60%, Holding 40%) Approx.4,000hrs. (Operation 60%, Holding 40%) Inspection every 6 m onths or the not use for 1m onth or longer. Cable No dam age, cracked or incorrect wiring Appearance No gouge or nick found on the body. Travel km 1,700 L[]Z[]3H 1,200 No debris, dust or water adhered.

LZ-OM004xx

(Operation 60%, Holding 40%) Approx.4,000hrs. (Operation 60%, Holding 40%) motor does not start or operation stops suddenly. Travel km L[]Z[]5L 280 L[]Z[]3M 640 L[]Z[]5M 850 L[]Z[]3 200 1,700 L[]Z[]3H 1,200 Note. Refer to the shorter data shown above. Energizing tim e Reference of travel depending lead Horizontal direction Reference for energizing tim e Model no.

Servo Motor Controller (24 VDC)

Also, this controller should be installed with 50mm 60 - or larger spaces between each side of it and the other structures or components. It may cause a malfunction of the controller and its peripheral devices and a fire. 4.

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

power supply (+) Lock release (+) [I/O cable] LEC CK4 Cable length (L) [m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Dot mark Insulation color Terminal no.

Clean Air Module

LVB3-8-3 Threaded type NPT 1/4 LVB3-8-4 End plate assembly 7 With 12 One-touch fitting LVB4-8-1 With One-touch fitting Rc 3/8 LVB4-8-2 Threaded type NPT 3/8 LVB4-8-3 Each module has 2 connecting brackets. 337 LLB Series Flow Rate Characteristics LLB3-1-P1R1VSF: Standard (100 L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

One-touch fitting 6 x 4 tube Pilot port size LQ1 Threaded M5 x 0.8 LVN Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 TL/TIL Mass (kg) 0.09 0.15 0.36 0.17 LQ3 Construction Standard type N.C. type N.O. type Double acting type PB PB PB q q q PA PA PA e e e A B A B A B A B A B r w With flow rate adjustment t PB PA Description Material Parts list No.

Fluoropolymer Piping Equipment

Note) Metric size 6, 8, 10 10, 12 Inch size 1/8", 3/16", 1/4" 1/4", 3/8" 3/8", 1/2" LVC Orifice diameter 4.4 8 10 0.4 1.2 1.8 Flow rate characteristics Av x Kv LVA 0.5 1.4 2.2 Cv Withstand pressure (MPa) 1 LVH Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 LVD Ambient temperature (C) 0 to 60 Weight (kg) LVQ 0.055 0.115 0.185 Note) For details of the applicable tubing sizes

212

[0.25] Outlet pressure psi [MPa] Outlet pressure psi [MPa] Outlet pressure psi [MPa] 29 [0.20] 29 [0.20] 29 [0.20] 22 [0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60

Booster Relay Series IL100

IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58