Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings 

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings 

Expelling contaminants outside a clean room can be done by: (11-) vacuum relief or (10- or 12-) exhaust relief. The 2*-CXS Copper, Fluorine, Silicone-free Series is a dual piston actuator with non-rotating accuracy ± 0.1° enhanced with lithium soap based grease making it clean room ready.

Expelling contaminants outside a clean room can be done by: (11-) vacuum relief or (10- or 12-) exhaust relief. The 2*-CXSJ Copper, Fluorine, Silicone-free Series is a dual piston actuator with non-rotating accuracy ± 0.1° enhanced with lithium soap based grease making it clean room ready.

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 11 (11 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: C4 (One-touch Fitting for Ø4)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 11 (11 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N7 (One-touch Fitting for Ø1/4), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Flow Range: 20 (1.8~20 l/min), Tube Size: 13 (1/2), Output Specification: 2 (Pulse Output + Analog Output (4~20mA)), Option: C (e-con Connector x 1 pc.)

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 2 (Pulse Output + Analog Output (4~20mA)), Option: C (e-con Connector x 1 pc.)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Body Size: 4, Pilot Type: 2 (Common External Pilot), Stations: 4 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8]

Body Size: 4, Pilot Type: 2 (Common External Pilot), Stations: 6 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8]

Body Size: 4, Pilot Type: 2 (Common External Pilot), Stations: 3 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8]

Body Size: 4, Pilot Type: 2 (Common External Pilot), Stations: 5 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8]

Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Attachment: C (Clear Cover Non Removable, Wrench Tighten)